公开(公告)号：US20160336145A1

公开(公告)日：2016-11-17

申请号：US15110284

申请日：2014-12-03

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yusuke OMINAMI ,  Kenji NAKAHIRA ,  Maki TANAKA ,  Shinsuke KAWANISHI

IPC: H01J37/22 ,  H01J37/20 ,  H01J37/18 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/221 ,  H01J2237/2608 ,  H01J2237/2806

Abstract: A charged-particle-beam device is provided with a data processing unit that removes, from a detector signal, the effect that scattering of a primary charged-particle beam before the primary charged-particle beam reaches a specimen has on the spot shape of the primary charged-particle beam. For example, when using an electron microscope to observe a specimen in a non-vacuum atmosphere, the effect that scattering of a primary charged-particle beam due to a barrier film or a gas present in a non-vacuum space has on the spot shape of the primary charged-particle beam is removed from a signal acquired by a detector. This makes it easy to obtain high-quality images.

Abstract translation: 带电粒子束装置设置有数据处理单元，该数据处理单元从检测器信号中去除在初级带电粒子束到达样本之前的初级带电粒子束的散射具有的斑点形状 初级带电粒子束。 例如，当使用电子显微镜在非真空气氛中观察样品时，由于阻挡膜或存在于非真空空间中的气体引起的初级带电粒子束的散射的影响具有点形状 的初级带电粒子束从由检测器获取的信号中去除。 这使得获得高质量图像变得容易。

公开(公告)号：US20150083908A1

公开(公告)日：2015-03-26

申请号：US14562260

申请日：2014-12-05

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke OMINAMI ,  Mami KONOMI ,  Sukehiro ITO ,  Tomohisa OHTAKI ,  Shinsuke KAWANISHI

IPC: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/26 ,  H01J37/22

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

Abstract: A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance.

Abstract translation: 样品观察方法使用带电粒子束装置，其包括照射带电粒子束的带电粒子光学柱，真空室和能够存储样品的样品室。 该方法包括通过允许带电粒子束透射的薄膜来保持样品室的压力高于真空室的压力，确定薄膜下表面的高度与薄膜的高度之间的关系 基于光学显微镜的镜筒的下端，测量样品和镜筒之间的距离，并根据关系和距离设定样品和薄膜之间的距离。