公开(公告)号：US07884445B2

公开(公告)日：2011-02-08

申请号：US11603562

申请日：2006-11-22

申请人： Ami Chand

发明人： Ami Chand

IPC分类号： H01L29/06

CPC分类号： B81C1/00873

摘要： An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.

摘要翻译： 一种用于将半导体器件保持在晶片中的装置和方法。 棒连接到晶片。 第一侧壁包括第一端和第二侧，并且在其第一端处连接到杆。 第一突片包括第一端和第二端，并且在其第一端处连接到第一侧壁的第二端并且在其第二端处连接到半导体器件的第一侧。 第一突片的厚度小于棒的厚度和第一侧壁的厚度。

公开(公告)号：US20080282819A1

公开(公告)日：2008-11-20

申请号：US12123363

申请日：2008-05-19

申请人： Kevin J. Kjoller ,  Ami Chand ,  Nihat Okulan

发明人： Kevin J. Kjoller ,  Ami Chand ,  Nihat Okulan

IPC分类号： G01D21/00 ,  G01B5/28

CPC分类号： G01Q60/38 ,  B82Y35/00

摘要： A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.

摘要翻译： 用于仪器的探针组件和制造方法包括在制造期间具有独立于典型对准误差的长度的衬底和悬臂。 在一个实施例中，探针组件包括介于基底和悬臂之间的缓冲部分。 悬臂从缓冲部分延伸，并且缓冲部分的一部分延伸超过基底的边缘。 缓冲部分的部分比悬臂更硬。 生产探针组件的相应方法有利于批量制作而不损害探针性能。

公开(公告)号：US07096711B2

公开(公告)日：2006-08-29

申请号：US10844200

申请日：2004-05-12

申请人： Ami Chand ,  Nihat Okulan

发明人： Ami Chand ,  Nihat Okulan

IPC分类号： G01B21/30

CPC分类号： G01Q40/02

摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling a bottom surface of the probe tip.

摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针末端的底表面进行成形。

公开(公告)号：US08397555B1

公开(公告)日：2013-03-19

申请号：US13036119

申请日：2011-02-28

申请人： Ami Chand

发明人： Ami Chand

IPC分类号： G01Q60/48 ,  G01Q70/16 ,  C23F1/00

CPC分类号： G01Q70/16 ,  G01Q70/10

摘要： The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.

摘要翻译： 本发明涉及扫描探针，其中悬臂通过集成触笔基座接触触针，以及用于制造这种探针的方法。 与其他类型的扫描探针相比，该探针提供了许多优点，以避免在某些应用中需要柔软的反射涂层，并且提供尖锐的触针尖端的简单制造，关于功能化尖端的灵活性以及最小的热漂移 减少双压缩效应。 这些特征的优点有助于通常采集样品的高分辨率图像，特别是在液体中。

公开(公告)号：US20080116533A1

公开(公告)日：2008-05-22

申请号：US11603562

申请日：2006-11-22

申请人： Ami Chand

发明人： Ami Chand

IPC分类号： H01L29/84 ,  H01L21/00

CPC分类号： B81C1/00873

摘要： An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.

摘要翻译： 一种用于将半导体器件保持在晶片中的装置和方法。 棒连接到晶片。 第一侧壁包括第一端和第二侧，并且在其第一端处连接到杆。 第一突片包括第一端和第二端，并且在其第一端处连接到第一侧壁的第二端并且在其第二端处连接到半导体器件的第一侧。 第一突片的厚度小于棒的厚度和第一侧壁的厚度。

公开(公告)号：US07210330B2

公开(公告)日：2007-05-01

申请号：US11466908

申请日：2006-08-24

申请人： Ami Chand ,  Nihat Okulan

发明人： Ami Chand ,  Nihat Okulan

IPC分类号： G01B21/30

CPC分类号： G01Q40/02

摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.

摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针尖端的端部或侧面进行成形。

公开(公告)号：US20060277972A1

公开(公告)日：2006-12-14

申请号：US11466908

申请日：2006-08-24

申请人： Ami Chand ,  Nihat Okulan

发明人： Ami Chand ,  Nihat Okulan

IPC分类号： G01N13/16 ,  G01B5/28 ,  G12B21/08

CPC分类号： G01Q40/02

摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.

摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针尖端的端部或侧面进行成形。

公开(公告)号：US06862921B2

公开(公告)日：2005-03-08

申请号：US09904634

申请日：2001-07-13

申请人： Ami Chand ,  Kevin J. Kjoller ,  Kenneth L. Babcock ,  Michael K. Harris

发明人： Ami Chand ,  Kevin J. Kjoller ,  Kenneth L. Babcock ,  Michael K. Harris

IPC分类号： G01B11/00 ,  G01B5/28 ,  G01B21/30 ,  G01D5/26 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q30/20 ,  G01Q60/00 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G01Q90/00 ,  G01N13/10 ,  G12B21/21

CPC分类号： G01Q70/16 ,  G01B5/28 ,  G01D5/26 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q80/00

摘要： A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

公开(公告)号：US20110092046A1

公开(公告)日：2011-04-21

申请号：US12980182

申请日：2010-12-28

申请人： Ami Chand

发明人： Ami Chand

IPC分类号： H01L21/78 ,  H01L21/32

CPC分类号： B81C1/00873

摘要： An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.

摘要翻译： 一种用于将半导体器件保持在晶片中的装置和方法。 棒连接到晶片。 第一侧壁包括第一端和第二侧，并且在其第一端处连接到杆。 第一突片包括第一端和第二端，并且在其第一端处连接到第一侧壁的第二端并且在其第二端处连接到半导体器件的第一侧。 第一突片的厚度小于棒的厚度和第一侧壁的厚度。

公开(公告)号：US07913544B1

公开(公告)日：2011-03-29

申请号：US11985622

申请日：2007-11-15

申请人： Ami Chand

发明人： Ami Chand

IPC分类号： G01Q70/16

CPC分类号： G01Q70/16 ,  G01Q70/10

摘要： The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.

摘要翻译： 本发明涉及扫描探针，其中悬臂通过集成触笔基座接触触针，以及用于制造这种探针的方法。 与其他类型的扫描探针相比，该探针提供了许多优点，以避免在某些应用中需要柔软的反射涂层，并且提供尖锐的触针尖端的简单制造，关于功能化尖端的灵活性以及最小的热漂移 减少双压缩效应。 这些特征的优点有助于通常采集样品的高分辨率图像，特别是在液体中。