公开(公告)号：US20100108881A1

公开(公告)日：2010-05-06

申请号：US12264805

申请日：2008-11-04

Applicant: MILOS TOTH ,  Rae Knowles ,  William Ralph Knowles

Inventor： MILOS TOTH ,  Rae Knowles ,  William Ralph Knowles

IPC: G01N23/00 ,  G12B21/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.

Abstract translation: 扫描透射电子显微镜在高压环境下与样品一起操作。 优选的检测器通过将散射或未散射的透射电子转换成二次电子来进行气体放大，用于有效的气体放大。

公开(公告)号：US20080185509A1

公开(公告)日：2008-08-07

申请号：US12027245

申请日：2008-02-06

Applicant: William Ralph Knowles

Inventor： William Ralph Knowles

IPC: H05H3/02

CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A particle-optical apparatus, such as an ESEM®, for simultaneous observing a sample with particles and photons. A pressure limiting aperture (PLA) is placed in a diaphragm between the objective lens of the ESEM® and the sample position. The distance between the sample position and the aperture is sufficiently small to allow a large collection angle of the photons through this aperture. A mirror is placed between the diaphragm and the objective lens. Due to the large collection angle for photons a large NA is achieved. The small distance between sample position and aperture also result in less scattering of electrons than occurs in ESEM's where a mirror is placed between aperture and sample position, as the electrons have to travel through only a limited length in a high pressure area. Embodiments describe combinations where e.g. an immersion lens is used.

Abstract translation: 用于同时观察具有颗粒和光子的样品的颗粒光学装置，例如ESEM。 压力限制孔（PLA）放置在ESEM（R）的物镜与样品位置之间的隔膜中。 样品位置和孔径之间的距离足够小，以允许光子通过该孔的大的收集角。 镜片放置在隔膜和物镜之间。 由于光子的收集角度大，所以实现了大的NA。 样品位置和孔径之间的小距离也导致电子散射比在孔径和样品位置之间放置镜子的ESEM中发生的少，因为电子必须在高压区域中仅通过有限的长度行进。 实施例描述了例如 使用浸没透镜。