Invention Application
US20080185509A1 PARTICLE-OPTICAL APPARATUS FOR SIMULTANEOUS OBSERVING A SAMPLE WITH PARTICLES AND PHOTONS
有权
用于同时观察具有颗粒和光子的样品的颗粒光学仪器
- Patent Title: PARTICLE-OPTICAL APPARATUS FOR SIMULTANEOUS OBSERVING A SAMPLE WITH PARTICLES AND PHOTONS
- Patent Title (中): 用于同时观察具有颗粒和光子的样品的颗粒光学仪器
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Application No.: US12027245Application Date: 2008-02-06
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Publication No.: US20080185509A1Publication Date: 2008-08-07
- Inventor: William Ralph Knowles
- Applicant: William Ralph Knowles
- Applicant Address: US OR HILLSBORO
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR HILLSBORO
- Main IPC: H05H3/02
- IPC: H05H3/02

Abstract:
A particle-optical apparatus, such as an ESEM®, for simultaneous observing a sample with particles and photons. A pressure limiting aperture (PLA) is placed in a diaphragm between the objective lens of the ESEM® and the sample position. The distance between the sample position and the aperture is sufficiently small to allow a large collection angle of the photons through this aperture. A mirror is placed between the diaphragm and the objective lens. Due to the large collection angle for photons a large NA is achieved. The small distance between sample position and aperture also result in less scattering of electrons than occurs in ESEM's where a mirror is placed between aperture and sample position, as the electrons have to travel through only a limited length in a high pressure area. Embodiments describe combinations where e.g. an immersion lens is used.
Public/Granted literature
- US07718979B2 Particle-optical apparatus for simultaneous observing a sample with particles and photons Public/Granted day:2010-05-18
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