Invention Application
US20080185509A1 PARTICLE-OPTICAL APPARATUS FOR SIMULTANEOUS OBSERVING A SAMPLE WITH PARTICLES AND PHOTONS 有权
用于同时观察具有颗粒和光子的样品的颗粒光学仪器

  • Patent Title: PARTICLE-OPTICAL APPARATUS FOR SIMULTANEOUS OBSERVING A SAMPLE WITH PARTICLES AND PHOTONS
  • Patent Title (中): 用于同时观察具有颗粒和光子的样品的颗粒光学仪器
  • Application No.: US12027245
    Application Date: 2008-02-06
  • Publication No.: US20080185509A1
    Publication Date: 2008-08-07
  • Inventor: William Ralph Knowles
  • Applicant: William Ralph Knowles
  • Applicant Address: US OR HILLSBORO
  • Assignee: FEI COMPANY
  • Current Assignee: FEI COMPANY
  • Current Assignee Address: US OR HILLSBORO
  • Main IPC: H05H3/02
  • IPC: H05H3/02
PARTICLE-OPTICAL APPARATUS FOR SIMULTANEOUS OBSERVING A SAMPLE WITH PARTICLES AND PHOTONS
Abstract:
A particle-optical apparatus, such as an ESEM®, for simultaneous observing a sample with particles and photons. A pressure limiting aperture (PLA) is placed in a diaphragm between the objective lens of the ESEM® and the sample position. The distance between the sample position and the aperture is sufficiently small to allow a large collection angle of the photons through this aperture. A mirror is placed between the diaphragm and the objective lens. Due to the large collection angle for photons a large NA is achieved. The small distance between sample position and aperture also result in less scattering of electrons than occurs in ESEM's where a mirror is placed between aperture and sample position, as the electrons have to travel through only a limited length in a high pressure area. Embodiments describe combinations where e.g. an immersion lens is used.
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