Cryopump and evacuation method
    11.
    发明授权
    Cryopump and evacuation method 有权
    冷冻和撤离方法

    公开(公告)号:US08875523B2

    公开(公告)日:2014-11-04

    申请号:US13443449

    申请日:2012-04-10

    申请人: Tsutomu Fukuda

    发明人: Tsutomu Fukuda

    IPC分类号: F25D25/00 F04B37/14 F04B37/02

    CPC分类号: F04B37/14 F04B37/02

    摘要: A cryopump includes a refrigerator which cools a cryopanel and a controller which receives a control signal representing an operation mode from a beam irradiating apparatus and controls the refrigerator based on the control signal. The operation mode includes an irradiation mode for irradiating a beam to a target and an idle mode for diverting the beam from the target or keeping the beam with a level weaker than that of the irradiation mode. The controller controls the refrigerator such that the cryopanel is cooled in both the irradiation mode and the idle mode to a cooling temperature at which gas molecules are held and allows the cooling temperature in at least a part of the period of the idle mode to be higher than that of the irradiation mode.

    摘要翻译: 低温泵包括冷冻冷冻板的冰箱和从束照射装置接收表示操作模式的控制信号的控制器,并基于控制信号控制冰箱。 操作模式包括用于将光束照射到目标物体的照射模式和用于将光束从靶子转向或将光束保持在比照射模式弱的水平的空闲模式。 控制器控制冰箱,使得冷冻板在照射模式和空闲模式下都被冷却到保持气体分子的冷却温度,并允许空闲模式的至少一部分时间内的冷却温度更高 比照射模式。

    Power source apparatus with harmonic suppression
    12.
    发明授权
    Power source apparatus with harmonic suppression 有权
    具有谐波抑制功能的电源设备

    公开(公告)号:US08559203B2

    公开(公告)日:2013-10-15

    申请号:US12662596

    申请日:2010-04-26

    IPC分类号: H02M5/42

    摘要: A power source apparatus includes: a first alternating current line; a second alternating current line; an electric power inputting portion including a rectifying circuit for rectifying an alternating current voltage supplied from an alternating current power source, the electric power inputting portion serving to output the rectified voltage to each of the first and second alternating current lines; a first converter including a switching element for converting the alternating current voltage into a first direct current voltage; a second converter for converting the first direct current voltage obtained in the first converter into a second direct current voltage; and a control circuit for carrying out control for driving at least the switching element of the first converter so as to be turned ON or OFF.

    摘要翻译: 电源装置包括:第一交流线; 第二交流线; 电力输入部,包括整流电路,用于对从交流电源供给的交流电压进行整流;电力输入部,用于将整流电压输出到第一和第二交流电线; 第一转换器,包括用于将交流电压转换成第一直流电压的开关元件; 第二转换器,用于将在第一转换器中获得的第一直流电压转换为第二直流电压; 以及控制电路,用于执行用于至少驱动第一转换器的开关元件的控制以被接通或断开。

    CRYOPUMP AND METHOD OF MANUFACTURING THE SAME
    14.
    发明申请
    CRYOPUMP AND METHOD OF MANUFACTURING THE SAME 审中-公开
    CRYOPUMP及其制造方法

    公开(公告)号:US20130061609A1

    公开(公告)日:2013-03-14

    申请号:US13458751

    申请日:2012-04-27

    申请人: Tsutomu FUKUDA

    发明人: Tsutomu FUKUDA

    IPC分类号: B01D8/00 B23P13/00

    CPC分类号: F04B37/08 Y10T29/49236

    摘要: A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption panels includes a front panel surface divided into an adsorption region of a non-condensable gas and a condensation region of a condensable gas.

    摘要翻译: 低温泵包括一组冷冻吸收板,它们由一个低温泵开口的低温泵内部开放空间和围绕低温泵内部开放空间的辐射屏蔽围绕。 至少一个冷冻吸收板包括分为不可冷凝气体的吸附区域和可冷凝气体的冷凝区域的前面板表面。

    Method for producing aluminum titanate sintered compact
    15.
    再颁专利
    Method for producing aluminum titanate sintered compact 有权
    钛酸铝烧结体的制造方法

    公开(公告)号:USRE42646E1

    公开(公告)日:2011-08-23

    申请号:US12285247

    申请日:2003-04-16

    IPC分类号: C04B35/478

    摘要: The present invention provides a raw material composition for preparing a sintered body of aluminum titanate, the composition comprising (i) 100 parts by weight of a mixture comprising 40 to 50 mol % of TiO2 and 60 to 50 mol % of Al2O3, (ii) 1 to 10 parts by weight of an alkali feldspar represented by the formula: (NxK1-x)AlSi3O8 (0≦x≦1), and (iii) 1 to 10 parts by weight of at least one Mg-containing component selected from the group consisting of a Mg-containing oxide with spinel structure, MgCO3 and MgO, and a process for preparing a sintered body of aluminum titanate comprising sintering a formed product prepared from the raw material composition at 1300 to 1700° C. According to the present invention, a sintered body of aluminum titanate having high mechanical strength and ability to be stably used at high temperatures, as well as its inherent properties of low coefficient of thermal expansion and high corrosion resistance, can be obtained.

    摘要翻译: 本发明提供了一种制备钛酸铝烧结体的原料组合物,该组合物包括(i)100重量份的包含40-50mol%TiO 2和60-50mol%Al 2 O 3的混合物,(ii) 1〜10重量份由式(NxK1-x)AlSi3O8(0≦̸ x< 1E; 1)表示的碱长石,和(iii)1〜10重量份的至少一种含Mg成分, 由具有尖晶石结构的含镁氧化物,MgCO 3和MgO组成的组,以及制备钛酸铝烧结体的方法,包括将由原料组合物制备的成形产品烧结在1300至1700℃。根据本发明 可以获得具有高机械强度和在高温下稳定使用的能力的钛酸铝烧结体,以及其低热膨胀系数和高耐腐蚀性的固有性质。

    Power source apparatus
    17.
    发明申请
    Power source apparatus 有权
    电源设备

    公开(公告)号:US20100302808A1

    公开(公告)日:2010-12-02

    申请号:US12662596

    申请日:2010-04-26

    IPC分类号: H02M3/22

    摘要: A power source apparatus includes: a first alternating current line; a second alternating current line; an electric power inputting portion including a rectifying circuit for rectifying an alternating current voltage supplied from an alternating current power source, the electric power inputting portion serving to output the rectified voltage to each of the first and second alternating current lines; a first converter including a switching element for converting the alternating current voltage into a first direct current voltage; a second converter for converting the first direct current voltage obtained in the first converter into a second direct current voltage; and a control circuit for carrying out control for driving at least the switching element of the first converter so as to be turned ON or OFF.

    摘要翻译: 电源装置包括:第一交流线; 第二交流线; 电力输入部,包括整流电路,用于对从交流电源供给的交流电压进行整流;电力输入部,用于将整流电压输出到第一和第二交流电线; 第一转换器,包括用于将交流电压转换成第一直流电压的开关元件; 第二转换器,用于将在第一转换器中获得的第一直流电压转换为第二直流电压; 以及控制电路,用于执行用于至少驱动第一转换器的开关元件的控制以被接通或断开。

    HEAD SUSPENSION AND METHOD OF MANUFACTURING HEAD SUSPENSION
    18.
    发明申请
    HEAD SUSPENSION AND METHOD OF MANUFACTURING HEAD SUSPENSION 有权
    头部悬挂和制造头枕的方法

    公开(公告)号:US20100085663A1

    公开(公告)日:2010-04-08

    申请号:US12571609

    申请日:2009-10-01

    IPC分类号: G11B5/48 G11B5/127

    摘要: A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an attaching part to which the piezoelectric element 13 is attached, and a load beam 35 having a flexure 39. A front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes adhesives that attach the piezoelectric element 13 to the attaching part. The adhesives are applied to and hardened at the attaching part one by one. At least one of the adhesives that is first applied to and hardened at the attaching part is electrically insulative.The head suspension 31 properly maintains electric insulation between the piezoelectric element 13 and the attaching part, sufficiently demonstrates original functions, and secures a rigidity balance and proper vibration characteristic.

    摘要翻译: 磁头悬架31具有响应于施加到其上的电压而变形的压电元件13,具有附接有压电元件13的附接部分的基板33和具有挠曲件39的负载梁35.前端 负载梁35根据压电元件13的变形而在摆动方向上移动。磁头悬架31包括将压电元件13附接到安装部的粘合剂。 将粘合剂逐一施加到附着部分并硬化。 首先在附着部分施加并固化的粘合剂中的至少一种是电绝缘的。 磁头悬架31适当地保持压电元件13和安装部之间的电绝缘,充分发挥原有的功能,并确保刚性平衡和适当的振动特性。

    Cryopump and regenerating method of the cryopump
    20.
    发明申请
    Cryopump and regenerating method of the cryopump 有权
    冷冻泵的低温泵和再生方法

    公开(公告)号:US20070256429A1

    公开(公告)日:2007-11-08

    申请号:US11599251

    申请日:2006-11-15

    申请人: Tsutomu Fukuda

    发明人: Tsutomu Fukuda

    IPC分类号: B01D8/00

    CPC分类号: F04B37/085 F04B37/08

    摘要: A cryopump and a regenerating method of the cryopump whereby temperatures of a first stage and a second stage can be securely increased to target temperatures and time required for regenerating can be shortened are provided. At the time of regenerating, the temperature of the second stage cooling stage is controlled based on the temperature detected by the second temperature detection part. In the case where the temperature of the first stage cooling stage reaches the limiting temperature, namely critical temperature, of the first stage displacer, the rotation in the reverse direction of the reversible motor is controlled or stopped and thereby the regenerating process is stopped for a while.

    摘要翻译: 提供了一种低温泵和低温泵的再生方法,其中可以将第一级和第二级的温度可靠地提高到目标温度和再生所需的时间。 在再生时,基于由第二温度检测部检测出的温度来控制第二级冷却级的温度。 在第一级冷却级的温度达到第一级置换器的极限温度即临界温度的情况下,控制或停止可逆电动机的反方向的旋转,从而停止再生过程 而。