摘要:
A cryopump includes a refrigerator which cools a cryopanel and a controller which receives a control signal representing an operation mode from a beam irradiating apparatus and controls the refrigerator based on the control signal. The operation mode includes an irradiation mode for irradiating a beam to a target and an idle mode for diverting the beam from the target or keeping the beam with a level weaker than that of the irradiation mode. The controller controls the refrigerator such that the cryopanel is cooled in both the irradiation mode and the idle mode to a cooling temperature at which gas molecules are held and allows the cooling temperature in at least a part of the period of the idle mode to be higher than that of the irradiation mode.
摘要:
A power source apparatus includes: a first alternating current line; a second alternating current line; an electric power inputting portion including a rectifying circuit for rectifying an alternating current voltage supplied from an alternating current power source, the electric power inputting portion serving to output the rectified voltage to each of the first and second alternating current lines; a first converter including a switching element for converting the alternating current voltage into a first direct current voltage; a second converter for converting the first direct current voltage obtained in the first converter into a second direct current voltage; and a control circuit for carrying out control for driving at least the switching element of the first converter so as to be turned ON or OFF.
摘要:
To provide an aluminum magnesium titanate crystal structure which can be used stably in variable high temperatures, because of its excellent heat resistance, thermal shock resistance, high thermal decomposition resistance and high mechanical property, and a process for its production. An aluminum magnesium titanate crystal structure, which is a solid solution wherein at least some of Al atoms in the surface layer of aluminum magnesium titanate crystal represented by the empirical formula MgxAl2(1−x)Ti(1+x)O5 (wherein 0.1≦x
摘要翻译:由于其耐热性,耐热冲击性,高耐热分解性和高机械性能优异,因此可以稳定地在可变高温下使用的钛酸铝镁晶体结构体及其制造方法。 钛酸铝镁晶体结构,其为由经验式Mg x Al 2(1-x)Ti(1 + x)O 5(1-x)O 5(1-x)O 5)表示的铝酸镁镁晶体的表面层中的至少一些Al原子的固溶体 x <1)被Si原子取代,其热膨胀系数为-6×10-6(1 / K)至6×10-6(1 / K),范围为50至800° C.在20℃/分钟的升温速度下,将钛酸镁镁的剩余比例保持在1100℃的气氛中至少为50%。
摘要:
A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption panels includes a front panel surface divided into an adsorption region of a non-condensable gas and a condensation region of a condensable gas.
摘要:
The present invention provides a raw material composition for preparing a sintered body of aluminum titanate, the composition comprising (i) 100 parts by weight of a mixture comprising 40 to 50 mol % of TiO2 and 60 to 50 mol % of Al2O3, (ii) 1 to 10 parts by weight of an alkali feldspar represented by the formula: (NxK1-x)AlSi3O8 (0≦x≦1), and (iii) 1 to 10 parts by weight of at least one Mg-containing component selected from the group consisting of a Mg-containing oxide with spinel structure, MgCO3 and MgO, and a process for preparing a sintered body of aluminum titanate comprising sintering a formed product prepared from the raw material composition at 1300 to 1700° C. According to the present invention, a sintered body of aluminum titanate having high mechanical strength and ability to be stably used at high temperatures, as well as its inherent properties of low coefficient of thermal expansion and high corrosion resistance, can be obtained.
摘要:
The present invention provides a process for preparing a sintered body comprising as a basic component aluminum magnesium titanate represented by the composition formula: MgxAl2(1−x)Ti(1+x)O5 wherein the value of x is 0.1≦x
摘要翻译:本发明提供一种制备烧结体的方法,其包含由组成式:Mg x Al 2(1-x)Ti(1 + x)O 5表示的碱性组分钛酸铝镁,其中x的值为0.1和nlE; x <1 。 该方法包括以下步骤:从包含含Mg化合物,含Al化合物和含Ti化合物的混合物的100重量份(以氧化物计算)的原料混合物烧结成形产品, 与上述组成式中的Mg,Al和Ti的金属组分比相同的金属组分比,以及由组成式:(NayK1-y)AlSi3O8表示的1-10重量份的碱长石,其中y的值为 0&nlE; y&nlE; 1。 根据本发明的方法,可以获得在高温下连续使用稳定性和优异的机械强度的钛酸镁镁烧结体,同时保持钛酸镁镁烧结体固有的低热膨胀性。
摘要:
A power source apparatus includes: a first alternating current line; a second alternating current line; an electric power inputting portion including a rectifying circuit for rectifying an alternating current voltage supplied from an alternating current power source, the electric power inputting portion serving to output the rectified voltage to each of the first and second alternating current lines; a first converter including a switching element for converting the alternating current voltage into a first direct current voltage; a second converter for converting the first direct current voltage obtained in the first converter into a second direct current voltage; and a control circuit for carrying out control for driving at least the switching element of the first converter so as to be turned ON or OFF.
摘要:
A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an attaching part to which the piezoelectric element 13 is attached, and a load beam 35 having a flexure 39. A front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes adhesives that attach the piezoelectric element 13 to the attaching part. The adhesives are applied to and hardened at the attaching part one by one. At least one of the adhesives that is first applied to and hardened at the attaching part is electrically insulative.The head suspension 31 properly maintains electric insulation between the piezoelectric element 13 and the attaching part, sufficiently demonstrates original functions, and secures a rigidity balance and proper vibration characteristic.
摘要:
A honeycomb filter, for removing from exhaust gas fine solid particles containing carbon, is an aluminum magnesium titanate sintered product obtained by firing at from 1000 to 1700° C. a product formed from a mixture comprising a Mg-containing compound, an Al-containing compound and a Ti-containing compound in the same metal component ratio as the metal component ratio of Mg, Al and Ti in aluminum magnesium titanate represented by the empirical formula MgxAl2(1−x)Ti(1+x)O5 (wherein 0
摘要翻译:一种蜂窝过滤器,用于从废气中除去细小的含有碳的固体颗粒,是一种铝镁钛酸盐烧结产品,其通过在1000至1700℃下煅烧获得的产物由含Mg的化合物,含Al的 化合物和含钛化合物,以与经验式Mg x Al 2(1-x)Ti(1 + x)O 5(1-x)O 5)表示的钛酸镁镁中的Mg,Al和Ti的金属组分比相同的金属组分比例(其中0 < x 1),或由以上述混合物计算为氧化物100质量份的混合物和1〜10质量份由经验式(NayK1-y)AlSi3O8表示的碱性长石(其中, 0 <= y <= 1)。
摘要:
A cryopump and a regenerating method of the cryopump whereby temperatures of a first stage and a second stage can be securely increased to target temperatures and time required for regenerating can be shortened are provided. At the time of regenerating, the temperature of the second stage cooling stage is controlled based on the temperature detected by the second temperature detection part. In the case where the temperature of the first stage cooling stage reaches the limiting temperature, namely critical temperature, of the first stage displacer, the rotation in the reverse direction of the reversible motor is controlled or stopped and thereby the regenerating process is stopped for a while.