发明申请
- 专利标题： CRYOPUMP AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： CRYOPUMP及其制造方法
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申请号： US13458751申请日： 2012-04-27
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公开(公告)号： US20130061609A1公开(公告)日： 2013-03-14
- 发明人: Tsutomu FUKUDA
- 申请人： Tsutomu FUKUDA
- 申请人地址： JP Tokyo
- 专利权人： SUMITOMO HEAVY INDUSTRIES, LTD.
- 当前专利权人： SUMITOMO HEAVY INDUSTRIES, LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-107670 20110512
- 主分类号： B01D8/00
- IPC分类号： B01D8/00 ; B23P13/00
摘要：
A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption panels includes a front panel surface divided into an adsorption region of a non-condensable gas and a condensation region of a condensable gas.
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