发明申请
- 专利标题: Cryopump and regenerating method of the cryopump
- 专利标题(中): 冷冻泵的低温泵和再生方法
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申请号: US11599251申请日: 2006-11-15
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公开(公告)号: US20070256429A1公开(公告)日: 2007-11-08
- 发明人: Tsutomu Fukuda
- 申请人: Tsutomu Fukuda
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Heavy Industries, LTD.
- 当前专利权人: Sumitomo Heavy Industries, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JPJP2006-128499 20060502
- 主分类号: B01D8/00
- IPC分类号: B01D8/00
摘要:
A cryopump and a regenerating method of the cryopump whereby temperatures of a first stage and a second stage can be securely increased to target temperatures and time required for regenerating can be shortened are provided. At the time of regenerating, the temperature of the second stage cooling stage is controlled based on the temperature detected by the second temperature detection part. In the case where the temperature of the first stage cooling stage reaches the limiting temperature, namely critical temperature, of the first stage displacer, the rotation in the reverse direction of the reversible motor is controlled or stopped and thereby the regenerating process is stopped for a while.
公开/授权文献
- US08302409B2 Cryopump and regenerating method of the cryopump 公开/授权日:2012-11-06
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