发明申请
US20070256429A1 Cryopump and regenerating method of the cryopump 有权
冷冻泵的低温泵和再生方法

Cryopump and regenerating method of the cryopump
摘要:
A cryopump and a regenerating method of the cryopump whereby temperatures of a first stage and a second stage can be securely increased to target temperatures and time required for regenerating can be shortened are provided. At the time of regenerating, the temperature of the second stage cooling stage is controlled based on the temperature detected by the second temperature detection part. In the case where the temperature of the first stage cooling stage reaches the limiting temperature, namely critical temperature, of the first stage displacer, the rotation in the reverse direction of the reversible motor is controlled or stopped and thereby the regenerating process is stopped for a while.
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