摘要:
A burner is arranged axially of a burner throat on a furnace wall and includes a nozzle body housed in a wind box and with a secondary air adjuster on a leading end of the nozzle body. The adjuster includes an end plate for defining together with a near-furnace side surface of the wind box a cylindrical space opened in an outer circumference thereof, a slide damper axially slidable for surrounding the cylindrical space, air vanes arranged at predetermined intervals and circumferentially of the cylindrical space for swirling a secondary air and drive means and for slide movement of the slide damper.
摘要:
A burner 15 where a secondary air regulator 36 is provided on a forward end of a nozzle main unit 16 to be installed along the central axis of a burner throat 13 being installed on a furnace wall 12 and to be accommodated in a wind box 14, wherein the secondary air regulator has an end plate 37 having a bored hole 38 penetrating in an axial direction and for forming a cylindrical space 48 with peripheral surface opened in a space with the furnace core side surface of the wind box, a rotary damper 42 having a bored hole 45 penetrating in an axial direction and being capable to open or close the hole on the end plate by rotating in a peripheral direction, a sliding damper 52 for surrounding the cylindrical space and being slidable in an axial direction, air vanes 46 and 47 installed at a predetermined distance along circumference of the cylindrical space and for giving swirling to the secondary air 34, first driving means 54, 56 and 44 for rotating the rotary sliding damper, and second driving means 53 and 55 for sliding the sliding damper.
摘要:
A semiconductor device manufacturing method includes loading plural dry-etched wafers one by one in a container having a side door so as to be disposed substantially horizontally and in layers vertically therein; and blowing out a purge gas horizontally to those wafers loaded in the container for 30 sec or more after all the subject wafers are loaded in the container while the side door is open.
摘要:
The invention provides a biomass mill, comprising a rotatable pulverizing table 5, a recessed groove 6 which is provided in form of ring on an upper surface of the pulverizing table and has an arcuate cross-section, a pressure roller 9 pressed into the recessed groove, a blowout hole 16 for blowing out the air from around the pulverizing table, and a chute 18 for supplying a wooden biomass toward a center of the pulverizing table, wherein the wooden biomass is supplied via the chute, the wooden biomass is pulverized between the pulverizing table and the pressure roller, and the pulverized wooden biomass is carried by blowing the air through the blowout hole, wherein a surface from an outer peripheral of the recessed groove to the blowout hole is flat surface.