公开(公告)号：US5746826A

公开(公告)日：1998-05-05

申请号：US347416

申请日：1994-12-02

Applicant: Tsuyoshi Hasegawa ,  Shigeyuki Hosoki ,  Makiko Kohno ,  Masakazu Ichikawa ,  Hitoshi Nakahara ,  Toshiyuki Usagawa

Inventor： Tsuyoshi Hasegawa ,  Shigeyuki Hosoki ,  Makiko Kohno ,  Masakazu Ichikawa ,  Hitoshi Nakahara ,  Toshiyuki Usagawa

IPC: G01Q60/10 ,  G01Q60/58 ,  G01Q80/00 ,  H01L21/205 ,  C30B25/04

CPC classification number: B82Y30/00 ,  B82Y40/00 ,  H01L21/0237 ,  H01L21/02381 ,  H01L21/0243 ,  H01L21/02433 ,  H01L21/0245 ,  H01L21/02491 ,  H01L21/02532 ,  H01L21/0262 ,  Y10S117/913 ,  Y10S977/855

Abstract: Utilizing rugged pattern of atomic size present on a crystalline substrate of a semiconductor such as silicon or selenium or the like, a microstructure body is produced on the substrate by forming a layer of a first element of one monolayer or less by arranging at the position of the substrate most stable in energy formed by ruggedness the atoms of the first element such as gold, silver, copper, nickel, palladium, platinum or an element of group IV and then depositing successively atoms of at least one second element of group III, group IV and group V on only at a part of the surface of the substrate on which said layer of one monolayer or less by vapor deposition, sputtering or the like.

Abstract translation: PCT No.PCT / JP94 / 00561 Sec。 371日期1994年12月2日第 102（e）1994年12月2日PCT PCT 1994年4月5日PCT公布。 公开号WO94 / 23445 日期1994年10月13日利用存在于诸如硅或硒等半导体的晶体衬底上的原子尺寸的粗糙图案，通过以下方式在基板上形成微结构体：通过形成一层单层或更小的第一元素层， 布置在基底最稳定的能量位置上，该能量由第一元素的原子如金，银，铜，镍，钯，铂或IV族元素的粗糙度形成，然后连续沉积至少一个第二元素的原子 仅在通过气相沉积，溅射等在其上存在一层或更少层的一层以上的基板表面的一部分上的III族，IV族和V族。

公开(公告)号：US5689494A

公开(公告)日：1997-11-18

申请号：US441700

申请日：1995-05-15

Applicant: Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

Inventor： Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

IPC: B82B3/00 ,  G01Q60/00 ,  G01Q80/00 ,  G01Q90/00 ,  G11B9/00 ,  G11B11/08 ,  G11B33/14 ,  H01J37/30 ,  H01J37/305 ,  H01J37/317 ,  G11B7/00

CPC classification number: G11B9/1436 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B11/08 ,  G11B33/14 ,  G11B9/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1445 ,  G11B9/1463 ,  G11B9/1472 ,  H01J37/3056 ,  H01J37/3174 ,  G01Q80/00 ,  H01J2237/31738 ,  H01J2237/31759 ,  Y10S977/856 ,  Y10S977/947

Abstract: A fine-fabrication method of solid surfaces relates to a new surface fabrication method allows a solid-device surface to be fabricated at an atomic scale so as to produce an ultra-fine device or a device for recording information at an ultra-high density. A probe is installed with a tip thereof facing to the surface of a specimen to undergo fabrication. A voltage for forming an electric field is applied between the probe and the specimen. The electric field is large enough to field-evaporate atoms constituting the specimen or the probe; the electric field field-evaporates atoms constituting the specimen, removing them from the surface of the specimen; and as another alternative, the electric field field-evaporates atoms constituting the probe, depositing them on the surface of the specimen. Further, in another surface atom fabrication method, while the surface of a specimen is observed at an atomic scale using a surface observation technique by means of a scanning tunnelling microscope, a pulsative voltage large enough for the field evaporation of atoms described above is applied between the probe and the specimen at any arbitrary desired positions on the surface of the specimen; and the pulsative voltage field-evaporates and, hence, eliminates atoms one by one from the surface of the specimen.

Abstract translation: 固体表面的精细制造方法涉及新的表面制造方法，可以以原子尺度制造固体器件表面，以便产生超细的器件或以超高密度记录信息的器件。 安装探针，其尖端面向样品的表面进行制造。 在探针和样品之间施加用于形成电场的电压。 电场足够大以使构成样品或探针的原子挥发蒸发; 电场场蒸发构成样品的原子，将其从试样的表面除去; 并且作为另一种替代方案，电场场蒸发构成探针的原子，将它们沉积在样品的表面上。 此外，在另一表面原子制造方法中，利用扫描隧道显微镜利用表面观察技术以原子尺度观察试样的表面，在上述原子的场蒸发之前足够大的脉动电压被施加在 探针和样品在样品表面上任意任意的位置; 并且脉动电压场蒸发，因此从样品的表面逐个消除原子。

公开(公告)号：US5416331A

公开(公告)日：1995-05-16

申请号：US934672

申请日：1992-09-11

Applicant: Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

Inventor： Masakazu Ichikawa ,  Shigeyuki Hosoki ,  Fumihiko Uchida ,  Shigeo Kato ,  Yoshihisa Fujisaki ,  Sumiko Fujisaki ,  Atsushi Kikugawa ,  Ryo Imura ,  Hajime Aoi ,  Kiyokazu Nakagawa ,  Eiichi Murakami

IPC: B82B3/00 ,  G01Q60/00 ,  G01Q80/00 ,  G01Q90/00 ,  G11B9/00 ,  G11B11/08 ,  G11B33/14 ,  H01J37/30 ,  H01J37/305 ,  H01J37/317

CPC classification number: G11B9/1436 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B11/08 ,  G11B33/14 ,  G11B9/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1445 ,  G11B9/1463 ,  G11B9/1472 ,  H01J37/3056 ,  H01J37/3174 ,  G01Q80/00 ,  H01J2237/31738 ,  H01J2237/31759 ,  Y10S977/856 ,  Y10S977/947

Abstract: A fine-fabrication method of solid surfaces relates to a new surface fabrication method allows a solid-device surface to be fabricated at an atomic scale so as to produce an ultra-fine device or a device for recording information at an ultra-high density. A probe is installed with a tip thereof facing to the surface of a specimen to undergo fabrication. A voltage for forming an electric field is applied between the probe and the specimen. The electric field is large enough to field-evaporate atoms constituting the specimen or the probe; the electric field field-evaporates atoms constituting the specimen, removing them from the surface of the specimen; and as another alternative, the electric field field-evaporates atoms constituting the probe, depositing them on the surface of the specimen. Further, in another surface atom fabrication method, while the surface of a specimen is observed at an atomic scale using a surface observation technique by means of a scanning tunnelling microscope, a pulsative voltage large enough for the field evaporation of atoms described above is applied between the probe and the specimen at any arbitrary desired positions on the surface of the specimen; and the pulsative voltage field-evaporates and, hence, eliminates atoms one by one from the surface of the specimen.

Abstract translation: PCT No.PCT / JP92 / 00015 Sec。 371日期：1992年9月11日 102（e）1992年9月11日PCT PCT 1991年1月10日PCT公布。 公开号WO92 / 12528 日期：1992年7月23日。固体表面的精细制造方法涉及新的表面制造方法，可以以原子尺度制造固体器件表面，以便制造超精细器件或用于记录信息的器件 超高密度。 安装探针，其尖端面向样品的表面进行制造。 在探针和样品之间施加用于形成电场的电压。 电场足够大以使构成样品或探针的原子挥发蒸发; 电场场蒸发构成样品的原子，将其从试样的表面除去; 并且作为另一种替代方案，电场场蒸发构成探针的原子，将它们沉积在样品的表面上。 此外，在另一表面原子制造方法中，利用扫描隧道显微镜利用表面观察技术以原子尺度观察试样的表面，在上述原子的场蒸发之前足够大的脉动电压被施加在 探针和样品在样品表面上任意任意的位置; 并且脉动电压场蒸发，因此从样品的表面逐个消除原子。

公开(公告)号：US5153434A

公开(公告)日：1992-10-06

申请号：US701090

申请日：1991-05-16

Applicant: Yusuke Yajima ,  Masakazu Ichikawa ,  Mikio Ichihashi ,  Ryo Suzuki ,  Masatoshi Takeshita

Inventor： Yusuke Yajima ,  Masakazu Ichikawa ,  Mikio Ichihashi ,  Ryo Suzuki ,  Masatoshi Takeshita

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/266 ,  H01J37/20

Abstract: An electron microscope and a method for obtaining microscopic images whereby the intensity and distribution of the internal magnetic field of a specimen are acquired with precision. The electron microscope irradiates a focused electron beam at a target specimen and detects the transmitted beam past the specimen. The irradiated position on the specimen is selected by one of three ways: by moving the specimen alone, by deflecting the focused electron beam before it enters the specimen, or by combining these two ways. In this setup, the internal magnetic field of the specimen under its irradiated spot is known through detection of the deflection of the electron beam caused by the Lorentz force and through arithmetic processing of the detected deflection. An actuator that moves the specimen comprises a support with a hole through which the electron beam passes, a specimen stage with a like hole, a plurality of piezoelectric devices, and a structure that lets the electron beam pass therethrough. The actuator also comprises a mobile stage mounted on the support and attached to the specimen stage via the multiple piezoelectric devices, the mobile stage causing the devices to shift the support normal to the electron beam. Another component of the actuator is a stage control means for supplying a driving voltage to the multiple piezoelectric devices for their position control.

公开(公告)号：US5973469A

公开(公告)日：1999-10-26

申请号：US981033

申请日：1998-04-13

Applicant: Haruhiko Higuchi ,  Masakazu Ichikawa ,  Hiroyuki Kihara ,  Tomomi Murakami ,  Hidetaka Tsuchiya

Inventor： Haruhiko Higuchi ,  Masakazu Ichikawa ,  Hiroyuki Kihara ,  Tomomi Murakami ,  Hidetaka Tsuchiya

IPC: H02P6/20 ,  H02P8/02 ,  H02P8/08 ,  H02P8/00

CPC classification number: H02P6/20 ,  H02P8/02 ,  H02P8/08

Abstract: It is an object of this invention to attain reliable starting characteristics and stable rotation performance of a motor in a motor of a phase synchronization driving type. To achieve this object, according to this invention, there is provided a motor driving apparatus having a stepping motor constituted by a stator with at least two poles, a rotor having a permanent magnet with at least two poles, and a driving coil magnetically coupled to the stator, a driving pulse generation means for outputting a driving pulse signal for driving the stepping motor, a driving circuit for supplying a driving current to the driving coil on the basis of the signal from the driving pulse generation means, a voltage detection circuit for detecting a counter electromotive voltage generated upon rotation of the rotor, and a pole position detection means for detecting the pole position of the rotating rotor with respect to the rotor on the basis of a detection signal generated by the voltage detection circuit, the driving pulse generation means controlling the output timing of the driving pulse signal on the basis of the detection signal from the pole position detection means, characterized in that the pole position detection means stops outputting the driving pulse signal on the basis of the detection signal from the voltage detection circuit which is detected during the output period of the driving pulse signal, and outputs a driving pulse signal having a phase opposite to that of the driving pulse signal.

Abstract translation: PCT No.PCT / JP97 / 01276 Sec。 371日期：1998年4月13日 102（e）日期1998年4月13日PCT 1997年4月11日PCT公布。 公开号WO97 / 38487 日期为1997年10月16日本发明的目的是获得电动机在相位同步驱动型电动机中的可靠起动特性和稳定的旋转性能。 为了达到这个目的，根据本发明，提供了一种马达驱动装置，其具有步进马达，该步进马达由具有至少两个极的定子构成，转子具有至少两个极的永磁体，以及驱动线圈，磁耦合到 定子，驱动脉冲产生装置，用于输出用于驱动步进电机的驱动脉冲信号;驱动电路，用于根据来自驱动脉冲发生装置的信号向驱动线圈提供驱动电流;电压检测电路，用于 检测在转子旋转时产生的反电动势;以及极位置检测装置，用于根据由电压检测电路产生的检测信号来检测旋转转子相对于转子的极位置，驱动脉冲产生 基于来自极位置检测装置的检测信号来控制驱动脉冲信号的输出定时 其特征在于，所述极位置检测装置根据来自所述驱动脉冲信号的输出期间检测出的电压检测电路的检测信号，停止输出驱动脉冲信号，并输出相位相反的驱动脉冲信号 到驱动脉冲信号。

公开(公告)号：US5572122A

公开(公告)日：1996-11-05

申请号：US141077

申请日：1993-10-26

Applicant: Yusuke Yajima ,  Yoshio Takahashi ,  Masakazu Ichikawa ,  Shigeyuki Hosoki

Inventor： Yusuke Yajima ,  Yoshio Takahashi ,  Masakazu Ichikawa ,  Shigeyuki Hosoki

IPC: G01N23/04 ,  G01R31/305 ,  G01R33/028 ,  G01R33/12 ,  G01R33/02 ,  G01R33/025

CPC classification number: G01R31/305

Abstract: An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.

Abstract translation: 使用聚焦电子束测量电磁场分布的装置可以以高分辨率和高可靠性测量样品中的电磁场分布。 聚焦电子束辐射系统用聚焦电子束照射样品。 样品倾斜机构围绕垂直于聚焦电子束的光轴的倾斜轴将样品倾斜180度。 电子束位置检测器测量当聚焦电子束透过样品时给予聚焦电子束的偏转的方向和数量。 此外，处理系统从方向和方向上的数据分别计算电场的方向和强度，以及分别在聚焦电子束透过的样本上的点上的磁场的方向和强度 电子束位置检测器在样品倾倒机构转换之前和之后测量的聚焦电子束的偏转量。 因此，可以彼此独立地分别观察试样中的电场和磁场。