Inkjet print head and method for manufacturing the same
    11.
    发明申请
    Inkjet print head and method for manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号:US20120019596A1

    公开(公告)日:2012-01-26

    申请号:US12929638

    申请日:2011-02-04

    Abstract: An inkjet print head and a method for manufacturing the same are provided. The inkjet print head includes: an upper board having a pressure chamber; and a lower board including an upper silicon layer, an insulating layer, and a lower silicon layer, wherein the lower board includes a projection formed of the upper silicon layer and protruded into the interior of the pressure chamber in order to reduce the space of the pressure chamber, and a lower surface of the upper board and an upper surface of the lower silicon layer are fixed.

    Abstract translation: 提供一种喷墨打印头及其制造方法。 喷墨打印头包括:具有压力室的上板; 以及包括上硅层,绝缘层和下硅层的下板,其中所述下板包括由所述上硅层形成并突出到所述压力室的内部的突起,以便减小所述上硅层的空间 压力室,上板的下表面和下硅层的上表面固定。

    Nozzle plate for inkjet head and method of manufacturing the nozzle plate
    12.
    发明授权
    Nozzle plate for inkjet head and method of manufacturing the nozzle plate 有权
    用于喷墨头的喷嘴板和制造喷嘴板的方法

    公开(公告)号:US07926910B2

    公开(公告)日:2011-04-19

    申请号:US11764844

    申请日:2007-06-19

    CPC classification number: B41J2/1606 B41J2/162 B41J2/164

    Abstract: A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.

    Abstract translation: 用于喷墨头的喷嘴板和喷嘴板的制造方法包括具有喷嘴的硅基板,形成在硅基板的外表面上的热氧化硅层和喷嘴的内壁,粘合层沉积在 形成在硅衬底的外表面上并由氧化硅形成的热氧化硅层和沉积在粘合层上的拒墨涂层。

    INKJET HEAD AND METHOD THEREOF
    13.
    发明申请
    INKJET HEAD AND METHOD THEREOF 审中-公开
    喷墨头及其方法

    公开(公告)号:US20110032291A1

    公开(公告)日:2011-02-10

    申请号:US12690956

    申请日:2010-01-21

    CPC classification number: B41J2/14233 B41J2/055

    Abstract: An inkjet head includes an ink chamber, a pressure chamber and a piezoelectric member. The ink chamber includes an ink storage area storing ink, a plurality of dampers filled with the ink to be discharged, and a plurality of nozzles connected to the dampers and discharging the ink. The pressure chamber is disposed on the ink chamber, overlapping at least two of the plurality of dampers, and includes a pressure transmitting medium. The piezoelectric member is disposed on the pressure chamber. The ink is discharged from the nozzles in substantially a same amount through control of a single piezoelectric member at one time.

    Abstract translation: 喷墨头包括墨水室,压力室和压电元件。 墨水室包括存储墨水的墨水存储区域,填充有要排出的墨水的多个阻尼器,以及连接到阻尼器并排出墨水的多个喷嘴。 压力室设置在墨水室上,与多个阻尼器中的至少两个重叠,并且包括压力传递介质。 压电元件设置在压力室上。 油墨通过一次控制单个压电元件从喷嘴排出大致相同的量。

    PIEZOELECTRIC ACTUATOR, METHOD OF MANUFACTURING THE SAME AND METHOD OF MANUFACTURING A PRINT HEAD
    14.
    发明申请
    PIEZOELECTRIC ACTUATOR, METHOD OF MANUFACTURING THE SAME AND METHOD OF MANUFACTURING A PRINT HEAD 审中-公开
    压电致动器,其制造方法和制造打印头的方法

    公开(公告)号:US20100171396A1

    公开(公告)日:2010-07-08

    申请号:US12553030

    申请日:2009-09-02

    Abstract: A piezoelectric actuator includes a first electrode layer, a piezoelectric layer and a second electrode layer. The first electrode layer is formed on a vibration plate. The piezoelectric layer is formed on the first electrode layer, the piezoelectric layer comprising piezoelectric particles formed on the surface of a self-assembled monolayer. The second electrode layer is formed on the piezoelectric layer to face the first electrode layer. Thus, a self-assembled monolayer is formed, so that the piezoelectric characteristics of a piezoelectric layer and/or the stiffness of the piezoelectric layer may be increased. Thus, piezoelectric characteristics of the piezoelectric actuator may be enhanced, and the required voltage, which is required to realize a proper deformation amount of the piezoelectric actuator, may be decreased. Moreover, the stiffness of the piezoelectric actuator may be increased, so that the vibration remaining at the piezoelectric actuator may be minimized even though the driving is finished.

    Abstract translation: 压电致动器包括第一电极层,压电层和第二电极层。 第一电极层形成在振动板上。 压电层形成在第一电极层上,压电层包括形成在自组装单层表面上的压电颗粒。 第二电极层形成在压电层上以面向第一电极层。 因此,形成自组装单层,从而可以增加压电层的压电特性和/或压电层的刚度。 因此,可以增强压电致动器的压电特性,并且可以减小实现压电致动器的适当变形量所需的所需电压。 此外,可以增加压电致动器的刚度,使得即使完成驱动,压电致动器处残留的振动也可以最小化。

    Piezoelectric inkjet printhead and method of manufacturing the same
    15.
    发明授权
    Piezoelectric inkjet printhead and method of manufacturing the same 失效
    压电喷墨打印头及其制造方法

    公开(公告)号:US07703895B2

    公开(公告)日:2010-04-27

    申请号:US11333540

    申请日:2006-01-18

    Abstract: A piezoelectric inkjet printhead including an upper substrate, having an ink inlet, a manifold connected with the ink inlet, and a plurality of pressure chambers arranged along at least one side of the manifold, wherein the ink inlet passes through the upper substrate, and the manifold and the pressure chambers are formed in a lower surface of the upper substrate, a lower substrate disposed directly adjacent the upper substrate, the lower substrate having a plurality of restrictors each connecting the manifold with one end of each of the pressure chambers, and a plurality of nozzles each being formed in a position of the lower substrate that corresponds to the other end of each of the pressure chambers to vertically pass through the lower substrate, wherein the plurality of restrictors are formed in an upper surface of the lower substrate, and a plurality of piezoelectric actuators.

    Abstract translation: 一种压电喷墨打印头,包括具有墨入口,与墨入口连接的歧管的上基板和沿着歧管的至少一侧布置的多个压力室,其中墨入口穿过上基板, 歧管和压力室形成在上基板的下表面中,下基板直接邻近上基板设置,下基板具有多个限制器,每个限制器将歧管与每个压力室的一端连接,并且 多个喷嘴各自形成在下基板的对应于每个压力室的另一端的位置以垂直地穿过下基板,其中多个限制器形成在下基板的上表面中,以及 多个压电致动器。

    Piezoelectric actuator inkjet head and method of forming the same
    16.
    发明申请
    Piezoelectric actuator inkjet head and method of forming the same 失效
    压电致动器喷墨头及其形成方法

    公开(公告)号:US20070195134A1

    公开(公告)日:2007-08-23

    申请号:US11581333

    申请日:2006-10-17

    Abstract: A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

    Abstract translation: 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极,形成在下电极上的与每个压力室对应的位置处的压电层,形成在下电极上的支撑焊盘,支撑焊盘接触压电体的一端 并且离开压电层的一端延伸,以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路,以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成,并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分,并且第二部分可以比第一部分更宽。

    Silicon wet etching method using parylene mask and method of manufacturing nozzle plate of inkjet printhead using the same
    17.
    发明申请
    Silicon wet etching method using parylene mask and method of manufacturing nozzle plate of inkjet printhead using the same 审中-公开
    使用聚对二苯乙烯掩模的硅湿式蚀刻方法和使用其制造喷墨打印头的喷嘴板的方法

    公开(公告)号:US20070134928A1

    公开(公告)日:2007-06-14

    申请号:US11505416

    申请日:2006-08-17

    CPC classification number: B41J2/161 B41J2/1628 B41J2/1629 B41J2002/14411

    Abstract: A silicon wet etching method to form at least two elements having different shapes in a silicon substrate using at least two wet etching processes includes forming a first etch mask made of parylene on a surface of the silicon substrate, forming a first element in the substrate by wet etching the silicon substrate for a first time using the first etch mask, forming a second etch mask made of a silicon oxide layer on the surface of the silicon substrate, and forming a second element by wet etching the silicon substrate for a second time using the second etch mask.

    Abstract translation: 使用至少两个湿蚀刻工艺在硅衬底中形成具有不同形状的至少两种元件的硅湿式蚀刻方法包括在硅衬底的表面上形成由聚对二甲苯制成的第一蚀刻掩模,在衬底中形成第一元件,通过 使用第一蚀刻掩模第一次湿蚀刻硅衬底,在硅衬底的表面上形成由氧化硅层制成的第二蚀刻掩模,并且通过湿法蚀刻硅衬底第二次来形成第二元件,第二次使用 第二蚀刻掩模。

    Inkjet print head and method for manufacturing the same
    19.
    发明授权
    Inkjet print head and method for manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号:US08485639B2

    公开(公告)日:2013-07-16

    申请号:US12929638

    申请日:2011-02-04

    Abstract: An inkjet print head and a method for manufacturing the same are provided. The inkjet print head includes: an upper board having a pressure chamber; and a lower board including an upper silicon layer, an insulating layer, and a lower silicon layer, wherein the lower board includes a projection formed of the upper silicon layer and protruded into the interior of the pressure chamber in order to reduce the space of the pressure chamber, and a lower surface of the upper board and an upper surface of the lower silicon layer are fixed.

    Abstract translation: 提供一种喷墨打印头及其制造方法。 喷墨打印头包括:具有压力室的上板; 以及包括上硅层,绝缘层和下硅层的下板,其中所述下板包括由所述上硅层形成并突出到所述压力室的内部的突起,以便减小所述上硅层的空间 压力室,上板的下表面和下硅层的上表面固定。

    INKJET PRINT HEAD
    20.
    发明申请
    INKJET PRINT HEAD 审中-公开
    INKJET打印头

    公开(公告)号:US20130135396A1

    公开(公告)日:2013-05-30

    申请号:US13584009

    申请日:2012-08-13

    CPC classification number: B41J2/14233 B41J2002/14411 B41J2202/11

    Abstract: There is provided an inkjet print head, including: a first substrate in which a first restrictor and a pressure chamber are formed; and a second substrate in which a manifold, a second restrictor, and a nozzle are formed, wherein the first restrictor is connected to the manifold and the second restrictor, and the second restrictor is connected to the first restrictor and the pressure chamber.

    Abstract translation: 提供一种喷墨打印头,包括:形成有第一限流器和压力室的第一基板; 以及第二基板,其中形成有歧管,第二限制器和喷嘴,其中所述第一限流器连接到所述歧管和所述第二限制器,并且所述第二限制器连接到所述第一限制器和所述压力室。

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