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    Synthetic quartz glass optical material and optical member for f2 excimer lasers
    114.
    发明申请
    Synthetic quartz glass optical material and optical member for f2 excimer lasers 有权
    合成石英玻璃光学材料和用于f2准分子激光器的光学构件

    公开(公告)号：US20020151425A1

    公开(公告)日：2002-10-17

    申请号：US10048309

    申请日：2002-01-29

    发明人： Akira Fujinoki ,  Hiroyuki Nishimura ,  Toru Yokota ,  Yasuyuki Yaginuma ,  Akira Sato ,  Tetsuji Ueda

    IPC分类号： C03C003/06 ,  C03C003/112

    CPC分类号： C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/32 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2203/54 ,  Y02P40/57

    摘要： An object of the present invention is to provide a synthetic quartz glass optical material having a high optical transmittance for a radiation 157 nm in wavelength emitted from F2 excimer laser and a high resistance against irradiation of a F2 excimer laser radiation, yet having a uniformity suitable for such a fine patterning using a F2 excimer laser, and to provide an optical member using the same. The problems above are solved by a synthetic quartz glass optical material for F2 excimer lasers having an OH group concentration of 0.5 ppm or lower, a fluorine concentration of 0.1 to 2 mol %, a hydrogen molecule concentration of 5null1016 molecules/cm3 or lower, a difference between the maximum and minimum fluorine concentrations within 20 mol ppm, and a difference between the maximum and minimum refraction indices of 2null10null5 or lower.

    摘要翻译： 本发明的目的是提供一种合成石英玻璃光学材料，其对于从F2准分子激光器发射的波长为157nm的辐射具有高的透光率，并且具有高的对F2准分子激光辐射照射的抗性，但具有适合的均匀性 对于使用F2准分子激光器的精细图案化，并提供使用其的光学部件。 上述问题通过具有OH基浓度为0.5ppm以下，氟浓度为0.1〜2mol％，氢分子浓度为5×1016分/ cm 3以下的F2准分子激光的合成石英玻璃光学材料来解决，a 最大和最小氟浓度在20 mol ppm内的差异，以及最大和最小折射率之间的差异为2×10-5或更低。

    Apparatus and method of doping silica with fluorine during laydown
    117.
    发明申请
    Apparatus and method of doping silica with fluorine during laydown 失效
    沉积期间用氟掺杂二氧化硅的装置和方法

    公开(公告)号：US20020073734A1

    公开(公告)日：2002-06-20

    申请号：US10033144

    申请日：2001-10-26

    发明人： Michael J. Lehman ,  V. Srikant ,  Jeffery S. Stone

    IPC分类号： C03B019/01

    CPC分类号： C03B37/0142 ,  C03B2201/12 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/34 ,  C03B2207/46

    摘要： A method for doping silica soot with fluorine during laydown, including providing a bait rod, and providing a burner, wherein the burner emits a reactant flame. The method also including providing at least one first gas-feed separate from the burner, wherein the gas-feed supplies a first jet of fluorine-based gases, and depositing a layer of silica soot on the bait rod by vaporizing a silica producing gas within the reactant flame of the burner. The method further including supplying the first jet of fluorine-based gases to the silica soot deposited on to the bait rod via the first gas-feed subsequent to vaporizing at least a portion of the silica producing gas within the reactant flame of the burner.

    摘要翻译： 一种在沉积期间用氟掺杂二氧化硅烟灰的方法，包括提供诱饵棒，并提供燃烧器，其中燃烧器发射反应物火焰。 该方法还包括提供与燃烧器分离的至少一个第一气体进料，其中气体进料供应氟基气体的第一射流，并通过汽化二氧化硅生成气体在饵料棒上沉积二氧化硅烟炱层 燃烧器的反应物火焰。 所述方法还包括在蒸发燃烧器的反应物火焰内的二氧化硅生成气体的至少一部分之后，经由第一气体进料将第一喷射氟基气体供应到沉积在诱饵杆上的二氧化硅烟灰。

    Method for making glasses containing rare earth fluorides by precipitating solution doped compounds
    118.
    发明授权
    Method for making glasses containing rare earth fluorides by precipitating solution doped compounds 失效
    通过沉淀溶液掺杂化合物制备含稀土氟化物的玻璃的方法

    公开(公告)号：US06401494B2

    公开(公告)日：2002-06-11

    申请号：US09915781

    申请日：2001-07-26

    申请人： Huailiang Wei

    发明人： Huailiang Wei

    IPC分类号： C03C1702

    CPC分类号： C03C3/06 ,  C03B37/01433 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/50 ,  C03B2201/54 ,  C03C23/0095 ,  C03C2201/12 ,  C03C2201/31 ,  C03C2201/34 ,  C03C2203/50

    摘要： A method that provides a new way to embed rare earth fluorides into silicate (or germania-doped silica) glasses by means of solution chemistry. Embedding rare earth fluorides into a silicate (or germania-doped silica) glass comprises the following steps. First, form a porous silicate core preform. Second, submerge the preform into an aqueous solution of rare earth ions. Third, remove the preform from the solution and wash the outside surfaces of the preform. Fourth, submerge the preform into an aqueous solution of a fluorinating agent to precipitate rare earth trifluorides from the solution and deposit in the pores or on the wall of the preform. This is followed by drying.

    摘要翻译： 一种通过溶液化学提供将稀土氟化物嵌入硅酸盐（或氧化锗掺杂二氧化硅）玻璃的新方法的方法。 将稀土氟化物嵌入硅酸盐（或掺锗二氧化硅）玻璃中包括以下步骤。 首先，形成多孔硅酸盐芯预制件。 第二，将预成型件浸入稀土离子的水溶液中。 第三，从溶液中取出预型件并洗涤预成型件的外表面。 第四，将预制件浸入氟化剂的水溶液中以从溶液中沉淀出稀土三氟化物，并沉积在预制件的孔或壁上。 然后干燥。

    Optical fiber and method of making the same
    119.
    发明授权
    Optical fiber and method of making the same 有权
    光纤及其制作方法

    公开(公告)号：US06400878B1

    公开(公告)日：2002-06-04

    申请号：US09939742

    申请日：2001-08-28

    申请人： Katsuya Nagayama ,  Yuichi Ohga ,  Tatsuhiko Saitoh ,  Shinji Ishikawa ,  Ichiro Tsuchiya ,  Takenori Uchiyama

    发明人： Katsuya Nagayama ,  Yuichi Ohga ,  Tatsuhiko Saitoh ,  Shinji Ishikawa ,  Ichiro Tsuchiya ,  Takenori Uchiyama

    IPC分类号： G02B602

    CPC分类号： G02B6/03627 ,  C03B37/02718 ,  C03B37/029 ,  C03B37/15 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2205/56 ,  C03C13/04 ,  G02B6/02

    摘要： An optical fiber preform 2 having a viscosity ratio R&eegr;=&eegr;0/&eegr;t of 2.5 or less between the core average viscosity &eegr;0 and the total average viscosity &eegr;t is prepared, and is drawn by a drawing furnace 11 so as to yield an optical fiber 3, which is then heated to a temperature within a predetermined range so as to be annealed by a heating furnace 21 disposed downstream the drawing furnace 11. Here, upon annealing in the heating furnace 21, the fictive temperature Tf within the optical fiber lowers, thereby reducing the Rayleigh scattering loss. At the same time, the viscosity ratio condition of R&eegr;≦2.5 restrains the stress from being concentrated into the core, thereby lowering the occurrence of structural asymmetry loss and the like. Hence, an optical fiber which can reduce the transmission loss caused by the Rayleigh scattering loss and the like as a whole, and a method of making the same can be obtained.

    摘要翻译： 准备在芯平均粘度eta0与总平均粘度etat之间具有2.5或更小的粘度比Reta = eta0 / etat的光纤预制棒2，并由拉丝炉11拉伸以产生光纤3， 然后将其加热到预定范围内的温度，以便通过设置在拉丝炉11下游的加热炉21进行退火。这里，在加热炉21中退火后，光纤内的假想温度Tf降低，从而降低 瑞利散射损失。 同时，Reta <= 2.5的粘度比条件限制了应力集中到芯中，从而降低了结构不对称损失的发生等。 因此，可以获得可以降低由瑞利散射损耗等引起的传输损耗等的整体的光纤及其制造方法。