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    Aerodynamic nozzle for aerosol particle beam formation into a vacuum
    91.
    发明授权
    Aerodynamic nozzle for aerosol particle beam formation into a vacuum 失效
    用于气溶胶粒子束形成真空的气动喷嘴

    公开(公告)号：US5565677A

    公开(公告)日：1996-10-15

    申请号：US511549

    申请日：1995-08-04

    Applicant: Anthony S. Wexler ,  Murray V. Johnston, III ,  Ramakrishna Mallina

    Inventor： Anthony S. Wexler ,  Murray V. Johnston, III ,  Ramakrishna Mallina

    IPC: F15D1/02 ,  H01J49/04 ,  H01J41/04

    CPC classification number: H01J49/067 ,  F15D1/02 ,  H01J49/0445

    Abstract: An aerodynamic nozzle for aerosol particle beam formation into a vacuum comprises a tubular column having a first stage section with a plurality of spaced aerodynamic lenses therein so that an aerosol entering the inlet end of the first stage section is formed into a beam of generally aligned particles. The beam exits the first stage section through an outlet orifice into a second stage section also having a plurality of spaced aerodynamic lenses to maintain the aerosol in its beam form. The beam then exists through a nozzle to an orifice at the discharge end of the second stage section into an evacuated region. The pressure decreases from the first stage (which is preferably at atmospheric pressure) to the second stage to the evacuated region.

    Abstract translation: 用于气溶胶粒子束形成真空的空气动力学喷嘴包括管状柱，其具有在其中具有多个间隔的空气动力学透镜的第一级部分，使得进入第一级部分的入口端的气溶胶形成为大致对准的粒子束 。 梁通过出口孔离开第一级段，进入第二级段，第二级段也具有多个间隔的空气动力学透镜，以将气溶胶保持其波束形式。 然后，梁通过喷嘴存在于第二阶段部分的排放端处的孔口进入抽空区域。 压力从第一阶段（其优选为大气压）降低到第二阶段到抽空区域。

    Ionization gauge and method of using and calibrating same
    92.
    发明授权
    Ionization gauge and method of using and calibrating same 失效
    电离计及其使用及校准方法

    公开(公告)号：US5296817A

    公开(公告)日：1994-03-22

    申请号：US906665

    申请日：1992-06-30

    Applicant: Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

    Inventor： Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

    IPC: G01L21/30 ,  G01L21/32 ,  G01L27/00 ,  H01J41/04

    CPC classification number: H01J41/04 ,  G01L21/32

    Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit from the anode volume.

    Abstract translation: 电离计及其操作方法，其中量规可以是Bayard-Alpert型，并且包括完全包围电子源，阳极和集电极的屏蔽，使得屏蔽外部的电位不会扰乱电荷分布 在屏蔽体积内，从而稳定仪表的灵敏度。 电离计进一步的特征在于以下特征，其可以单独存在或组合存在，包括：（a）阳极设置有端盖，其径向向内延伸至阳极半径的至少25％但不大于75 半径的百分比; （b）离子收集器的直径不小于0.015英寸，不大于0.080英寸。 （c）离子收集器至少通过阳极的部分端盖之一在其自由端处延伸; （d）电子源基本上不比阳极体积内的区域基本上更长，其中电场主要指向径向向内并且电子源基本上仅与前述区域相邻; （e）阳极在其中电子进入阳极体积并且它们从阳极体积排出的区域中具有基本均匀的透明网格结构。

    Method and apparatus for measuring degree of vacuum in an electron microscope
    93.
    发明授权
    Method and apparatus for measuring degree of vacuum in an electron microscope 失效
    用于在电子显微镜中测量真空度的方法和装置

    公开(公告)号：US4803356A

    公开(公告)日：1989-02-07

    申请号：US70549

    申请日：1987-07-07

    Applicant: Hiroki Kumahora ,  Tsuneyuki Hashimoto ,  Eiichi Nishimura

    Inventor： Hiroki Kumahora ,  Tsuneyuki Hashimoto ,  Eiichi Nishimura

    IPC: G01L21/32 ,  G01N23/225 ,  H01J37/18 ,  H01J37/26 ,  H01J41/04 ,  G21K1/00

    CPC classification number: H01J37/18

    Abstract: The present invention comprises disposing an electrode group consisting of an anode and cathodes provided on both sides of the anode at a portion where the degree of vacuum in an electron microscope is to be measured closing in thermal electrons between the electrode group and a magnetic field forming lens systems such as objective lens system, condenser lens system and the like of the electron microscope, collecting a gas ionized by the thermal electrons closed therebetween to measure an ionic current, thereby realizing measurement of a degree of vacuum on a sample specimen part or thereabout without deteriorating a performance of the electrons microscope. For generating the thermal electron, for example, an observing electron beam of the electron microscope is collided with cathodes of the electrode group. For measuring the degree of vacuum on the sample specimen part of thereabout, the anode is disposed between an objective lens pole piece and a sample specimen holder stage and the objective lens pole piece and the sample specimen holder stage are used as cathodes so that the degree of vacuum can simply be measured thereby.

    Abstract translation: 本发明包括将由阳极组成的电极组和设置在阳极两侧的阴极的电极组和磁场形成之间的热电子闭合的电子显微镜中的真空度进行测量的部分 透镜系统如电子显微镜的物镜系统，聚光透镜系统等，收集由其间封闭的热电子离子化的气体来测量离子电流，从而实现对样品部分或其上的真空度的测量 而不会劣化电子显微镜的性能。 为了产生热电子，例如，电子显微镜的观察电子束与电极组的阴极相撞。 为了测量其上的样品部分的真空度，将阳极设置在物镜极片和样品保持台之间，并且将物镜极片和样品保持台用作阴极，使得程度 可以简单地测量真空度。

    Capillary membrane interface for a mass spectrometer
    94.
    发明授权
    Capillary membrane interface for a mass spectrometer 失效
    用于质谱仪的毛细管膜界面

    公开(公告)号：US4791292A

    公开(公告)日：1988-12-13

    申请号：US855894

    申请日：1986-04-24

    Applicant: Robert G. Cooks ,  Mark E. Bier ,  Jennifer S. Brodbelt ,  James C. Tou ,  Lemoyne B. Westover

    Inventor： Robert G. Cooks ,  Mark E. Bier ,  Jennifer S. Brodbelt ,  James C. Tou ,  Lemoyne B. Westover

    IPC: H01J49/04 ,  H01J41/04

    CPC classification number: H01J49/0404 ,  H01J49/0436

    Abstract: A device for introducing a sample into a mass spectrometer which generally comprises a probe which is connected to the mass spectrometer and a semipermeable capillary tube connected at the end of the probe. The probe includes conduit passageways for permitting bidirectional fluid flow through the probe, and the capillary tube is connected to the end of the probe so as to permit the flow of a fluid containing the sample to be analyzed through the probe and the capillary tube. This fluid flow through the capillary tube will enable at least a portion of the sample to be transferred into the mass spectrometer via diffusion through the capillary tube.

    Abstract translation: 用于将样品引入质谱仪的装置，其通常包括连接到质谱仪的探针和连接在探针末端的半透性毛细管。 探头包括用于允许双向流体流过探针的导管通道，并且毛细管连接到探针的端部，以允许含有待分析样品的流体通过探针和毛细管流动。 流经毛细管的流体将使至少一部分样品通过毛细管的扩散而被转移到质谱仪中。

    Vacuum gauge
    95.
    发明授权
    Vacuum gauge 失效
    真空计

    公开(公告)号：US4307323A

    公开(公告)日：1981-12-22

    申请号：US137461

    申请日：1980-04-04

    Applicant: Daniel G. Bills ,  Paul C. Arnold

    Inventor： Daniel G. Bills ,  Paul C. Arnold

    IPC: H01J41/04 ,  H05B31/26

    CPC classification number: H01J41/04

    Abstract: A hot filament ionization gauge is provided with a very small diameter and/or very short collector to limit interception of X-ray flux. Suitable gauge sensitivity is achieved by additionally collecting ions at the collector support, which is shielded from the X-ray flux by a shield. Collection of ions by the shield is avoided by maintaining the shield at grid potential.

    Abstract translation: 热丝电离计具有非常小的直径和/或非常短的集电极以限制X射线通量的截取。 通过在收集器支撑件处另外收集离子来实现合适的测量灵敏度，其通过屏蔽物与X射线通量屏蔽。 通过将屏蔽保持在电网电位来避免屏蔽物收集离子。

    Monitoring of vapor density in vapor deposition furnance by emission spectroscopy
    96.
    发明授权
    Monitoring of vapor density in vapor deposition furnance by emission spectroscopy 失效
    通过排放光谱监测蒸气沉积物中的蒸气密度

    公开(公告)号：US3609378A

    公开(公告)日：1971-09-28

    申请号：US3609378D

    申请日：1966-10-31

    Applicant: AIR REDUCTION

    Inventor： SMITH HUGH ROSCOE JR

    IPC: C23C14/54 ,  H01J37/304 ,  H01J37/305 ,  H01J41/04 ,  G02F1/28

    CPC classification number: C23C14/544 ,  H01J37/304 ,  H01J37/3053 ,  H01J41/04

    Abstract: The rate of vapor deposition in a vacuum furnace heated by electron bombardment is monitored or controlled. The vapor is ionized, preferably by the same electron bombardment as produces it. The ionized vapor radiates light which is detected at one or more locations within the furnace, preferably by a photomultiplier optically coupled by a light pipe to the interior of the furnace. The light detector produces a signal indicative of the intensity of the light detected and, hence, of the vapor density. Optical filters may be used to pass light of frequency characteristic of particular elements, so that the relative intensity of the particular elements in the vapor may be selectively detected. The signals may be recorded or used to control the heating and, hence, vapor density, as by controlling the electron emission from an electron gun.

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