公开(公告)号：US20200260959A1

公开(公告)日：2020-08-20

申请号：US15781630

申请日：2016-12-13

Applicant: HORIBA , Ltd.

Inventor： Seichi SATO

IPC: A61B5/00 ,  G01J3/18 ,  G01J3/02 ,  G01J3/10 ,  G02B27/42

Abstract: This invention is to provide a spectroscope that can improve resolution and reduce loss of light intensity and/or distortion of a wave front while enabling detection of the optical spectrum for each of a plurality of polarization components in incident light. The spectroscope is a spectroscope that comprises a first diffraction grating 51 to which at least a transmitted light or a reflected light from an object to be measured enters, which diffracts a first polarization component of the incident light and which transmits a second polarization component that is different from the first polarization component of the incident light without diffraction, and a first light-receiving element 55 that receives a spectrum of the light diffracted by the first diffraction grating 51.

公开(公告)号：US20200249090A1

公开(公告)日：2020-08-06

申请号：US16266132

申请日：2019-02-04

Applicant: Shimadzu Corporation

Inventor： Masato WATANABE

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02

Abstract: The purpose is to reduce the influence on the measurement due to high order diffracted light without arranging a filter for removing high order diffracted light between a diffraction grating and a PDA. The correction method includes a correction coefficient determination step of determining a correction coefficient on a rate of a detection signal value derived from a second order diffracted light of light in the first wavelength range contained in a detection signal value of a long wavelength side photodiode for detecting light in the second wavelength range in the photodiode array, and a correction unit configured to obtain a detection signal value derived from light in the second wavelength range from a detection signal value of the long wavelength side photodiode by using the correction coefficient determined by the correction coefficient determination step.

公开(公告)号：US10724899B2

公开(公告)日：2020-07-28

申请号：US16541405

申请日：2019-08-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yasuhiro Hidaka

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/10 ,  G01J3/18

Abstract: Provided are a spectrometer optical system and a semiconductor inspection apparatus, for reducing cost by allowing a wide field of view, high spatial resolution, and high wavelength resolution to be compatible with one another. The spectrometer optical system includes a masking having a slit, a first spherical mirror positioned to reflect light received from the slit, a second spherical mirror positioned to reflect the light reflected from the first spherical mirror, a dispersion element positioned to receive the light reflected from the second spherical mirror, and an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light.

公开(公告)号：US10718667B1

公开(公告)日：2020-07-21

申请号：US14657355

申请日：2015-03-13

Applicant: Wavefront Research Inc.

Inventor： Thomas A. Mitchell

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02

Abstract: A reflective relay spectrometer design based on reflective optical relay systems, which is more compact in physical size and superior in spectral imaging quality than previous designs, is disclosed.

公开(公告)号：US10682044B2

公开(公告)日：2020-06-16

申请号：US16476826

申请日：2018-01-10

Applicant: Canon U.S.A., Inc.

Inventor： Tzu-Yu Wu ,  Mitsuhiro Ikuta ,  Seiji Takeuchi ,  Naoki Kohara ,  Osamu Koyama

IPC: A61B1/00 ,  A61B1/07 ,  G01J3/02 ,  G01J3/18 ,  G02B5/18 ,  G02B3/00

Abstract: A Spectrally Encoded Forward View or Multi-View Endoscope, Probe, and Imaging Apparatus and system, and methods and storage mediums for use therewith, are provided herein. At least one apparatus or system may comprise a first waveguide; an optical system; and a diffraction grating. The first waveguide may be for guiding light from a light source to an output port of the first waveguide. The optical system may comprise at least a first reflecting surface and a second reflecting surface. The first reflecting surface may be arranged to reflect light from the output port of the first waveguide to the second reflecting surface. The second reflecting surface may be arranged to reflect light from the first reflecting surface back through the first reflecting surface to the diffraction grating. The diffraction grating may diffract light from the second reflecting surface in several lights/colors of non-zero diffraction orders in a first direction.

公开(公告)号：US10663668B2

公开(公告)日：2020-05-26

申请号：US16150293

申请日：2018-10-03

Applicant: SHIMADZU CORPORATION

Inventor： Masaaki Kitawaki

IPC: G02B6/293 ,  G02B26/08 ,  G01J3/10 ,  G01J3/18 ,  G02B6/35 ,  G01J3/12

Abstract: An optical splitter includes a housing, a diffraction grating, and an optical filter. An incidence unit and an emission unit are provided in the housing. The optical filter is disposed between the emission unit and the diffraction grating in the housing. An anti-reflection coating is formed on a surface of a filter main body of the optical filter on the emission unit side. Therefore, from light dispersed by the diffraction grating and having passed through the optical filter, light reflected at a back surface of the emission unit passes through the optical filter without being reflected by a back surface of the optical filter and is directed toward the inside of the housing. As a result, light having passed through the optical filter and having a wavelength other than a target wavelength is inhibited from being emitted from an emission slit of the emission unit.

公开(公告)号：US10663659B2

公开(公告)日：2020-05-26

申请号：US16438425

申请日：2019-06-11

Applicant: Finisar Corporation

Inventor： Daniel Mahgerefteh

IPC: G02B6/12 ,  G02B6/293 ,  G02B5/18 ,  G01J3/18 ,  G01J3/02 ,  G02B6/124

Abstract: In an example, an Echelle grating wavelength division multiplexing (WDM) device includes a first waveguide, a slab waveguide, multiple second waveguides, an Echelle grating, and a metal-filled trench. The first waveguide includes either an input waveguide or an output waveguide. The multiple second waveguides are optically coupled to the first waveguide through the slab waveguide. The multiple second waveguides include multiple output waveguides if the first waveguide includes the input waveguide or multiple input waveguides if the first waveguide includes the output waveguide. The Echelle grating includes multiple grating teeth formed in the slab waveguide. The metal-filled trench forms a mirror at the grating teeth to reflect incident light from the first waveguide toward the multiple second waveguides or from the multiple second waveguides toward the first waveguide.

公开(公告)号：US10656012B2

公开(公告)日：2020-05-19

申请号：US16229355

申请日：2018-12-21

Applicant: Amir H. Atabaki ,  Rajeev J. Ram ,  William F. Herrington

Inventor： Amir H. Atabaki ,  Rajeev J. Ram ,  William F. Herrington

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01J3/18 ,  G01N21/65 ,  G01J1/42 ,  G01J3/433 ,  G02B6/293

Abstract: In swept source Raman (SSR) spectroscopy, a swept laser beam illuminates a sample, which inelastically scatters some of the incident light. This inelastically scattered light is shifted in wavelength by an amount called the Raman shift. The Raman-shifted light can be measured with a fixed spectrally selective filter and a detector. The Raman spectrum can be obtained by sweeping the wavelength of the excitation source and, therefore, the Raman shift. The resolution of the Raman spectrum is determined by the filter bandwidth and the frequency resolution of the swept source. An SSR spectrometer can be smaller, more sensitive, and less expensive than a conventional Raman spectrometer because it uses a tunable laser and a fixed filter instead of free-space propagation for spectral separation. Its sensitivity depends on the size of the collection optics. And it can use a nonlinearly swept laser beam thanks to a wavemeter that measures the beam's absolute wavelength during Raman spectrum acquisition.

公开(公告)号：US20200096388A1

公开(公告)日：2020-03-26

申请号：US16584726

申请日：2019-09-26

Applicant: California Institute of Technology

Inventor： Thomas S. Pagano

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/10 ,  G01J3/06 ,  G01W1/08

Abstract: A CubeSat compatible spectrometer including a slit having a first length and first width; a diffraction grating; and a two dimensional focal plane array electromagnetically coupled to the diffraction grating. The 2D focal plane array includes an array of pixels including a plurality of sets of pixels. Diffraction of electromagnetic radiation transmitted through the slit by the diffraction grating forms a plurality of beams, each of the beams comprising a different one of the bands of the wavelengths in the electromagnetic radiation, and each of the beams transmitted onto a different one of the sets of the pixels.

公开(公告)号：US10591417B2

公开(公告)日：2020-03-17

申请号：US16448670

申请日：2019-06-21

Applicant: Verily Life Sciences LLC

Inventor： Charles Santori ,  Supriyo Sinha ,  Cheng-Hsun Wu ,  James Higbie ,  Seung Ah Lee

IPC: G01J3/18 ,  G01N21/64 ,  G01J3/44 ,  G02B21/00 ,  G02B21/16 ,  G01J3/10 ,  G01J3/28 ,  G01J3/433 ,  G01J3/02 ,  A61B5/00 ,  G01J3/32 ,  G01J3/12

Abstract: Systems and methods for hyperspectral imaging are described. In one implementation, a hyperspectral imaging system includes a sample holder configured to hold a sample, an illumination system, and a detection system. The illumination system includes a light source configured to emit excitation light having one or more wavelengths and a diffractive element. The illumination system is configured to structure the excitation light into a predetermined two-dimensional pattern at a conjugate plane of a focal plane in the sample, spectrally disperse the structured excitation light in a first lateral direction, and illuminate the sample in an excitation pattern with the one or more wavelengths dispersed in the first lateral direction.