SYSTEMS AND METHODS FOR HIGH FREQUENCY ISOLATION
    92.
    发明申请
    SYSTEMS AND METHODS FOR HIGH FREQUENCY ISOLATION 有权
    高频隔离系统与方法

    公开(公告)号:US20140085778A1

    公开(公告)日:2014-03-27

    申请号:US13628911

    申请日:2012-09-27

    IPC分类号: H05K5/00 F16F7/00 F16M13/00

    CPC分类号: B81B7/0016 Y10T74/2131

    摘要: Systems and methods for providing vibration isolation for a MEMS device are provided. In at least one embodiment, a system comprises a first assembly and a second assembly, wherein the second assembly and the first assembly are joined together, enclosing the MEMS device, wherein the joined first assembly and the second assembly have a recessed groove formed on an interior surface. Further, the system comprises a rigid support encircling the MEMS device, the rigid support fitting within the recessed groove; and at least one mount isolator in contact with a plurality of surfaces of the rigid support, wherein the at least one mount isolator interfaces the plurality of surfaces of the rigid support with the first assembly and the second assembly, when the first assembly and the second assembly are joined together.

    摘要翻译: 提供了用于为MEMS器件提供隔振的系统和方法。 在至少一个实施例中,系统包括第一组件和第二组件,其中第二组件和第一组件连接在一起,封装MEMS器件,其中所连接的第一组件和第二组件具有形成在 内表面。 此外,该系统包括围绕MEMS装置的刚性支撑件,在凹槽内的刚性支撑配件; 以及与所述刚性支撑件的多个表面接触的至少一个安装隔离器,其中当所述第一组件和所述第二组件与所述第二组件接合时,所述至少一个安装隔离器将所述刚性支撑件的所述多个表面与所述第一组件和所述第二组件接合 组件连接在一起。

    ANGULAR SPEED SENSOR AND COMPOSITE SENSOR FOR DETECTING ANGULAR SPEED AND ACCELERATION
    96.
    发明申请
    ANGULAR SPEED SENSOR AND COMPOSITE SENSOR FOR DETECTING ANGULAR SPEED AND ACCELERATION 有权
    用于检测角速度和加速度的角速传感器和复合传感器

    公开(公告)号:US20120312094A1

    公开(公告)日:2012-12-13

    申请号:US13579346

    申请日:2011-02-16

    IPC分类号: G01C19/56 G01C19/5607

    摘要: A placing member (80) is configured to be supported from an outside by a terminal (81) electrically connected to a terminal electrode, and an X-axis-direction extended portion (84), a Y-axis-direction extended portion (82), and a Z-axis-direction extended portion (83) are provided in the terminal (81). This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.

    摘要翻译: 配置构件(80)通过与端子电极电连接的端子(81)和X轴方向延伸部(84),Y轴方向延伸部(82) )和Z轴方向延伸部(83)设置在端子(81)中。 这种结构提供了一种角速度传感器,其中消除了从外部施加的Y轴方向和Z轴方向振动不能被阻尼的问题,并且可以抑制三轴方向上的所有振动。

    Optical deflector
    97.
    发明授权
    Optical deflector 有权
    光学偏转器

    公开(公告)号:US07773282B2

    公开(公告)日:2010-08-10

    申请号:US12554636

    申请日:2009-09-04

    IPC分类号: G02B26/08

    摘要: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

    摘要翻译: 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂,其包括支撑体和形成在所述支撑体上的压电体,所述压电悬臂的一端连接到所述扭杆,所述压电悬臂的另一端连接到所述支撑件,所述压电悬臂在施加时 对压电体的驱动电压,由于压电性而呈现弯曲变形,从而使所述扭杆旋转,从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器,所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。

    Internally shock caged serpentine flexure for micro-machined accelerometer
    98.
    发明申请
    Internally shock caged serpentine flexure for micro-machined accelerometer 有权
    用于微加工加速度计的内部震动笼形蛇形弯曲

    公开(公告)号:US20050126287A1

    公开(公告)日:2005-06-16

    申请号:US10736330

    申请日:2003-12-15

    申请人: David Malametz

    发明人: David Malametz

    摘要: An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively stationary frame by a plurality of serpentine suspension members having internal caging. The device provides easily implemented fabrication modification for trading-off between input range and pick-off sensitivity by altering etching periods of the serpentine suspension members. The input range and pick-off sensitivity can be traded-off by enlarging or reducing the quantity of elongated flexure fingers forming the serpentine suspension member. Different ones of the elongated flexure fingers are optionally formed with different thicknesses, whereby the serpentine suspension member exhibits a spring rate that progressively increases as it is compressed by in-plane motion of the proof mass relative to the relatively stationary frame.

    摘要翻译: 一种用于感测加速度和其他力的装置和方法。 该装置具有电容拾取力传感器,其具有相对于相对固定的框架被多个具有内部笼子的蛇形悬挂构件悬挂的证明质量块。 该装置通过改变蛇形悬挂构件的蚀刻周期提供了容易实现的制造修改,用于在输入范围和拾取灵敏度之间进行折衷。 可以通过扩大或减少形成蛇形悬挂构件的细长弯曲指头的数量来消除输入范围和拾取灵敏度。 不同的细长挠曲指状物可任选地形成有不同的厚度,由此蛇形悬挂构件表现出弹性率,其随着其被相对于相对静止的框架的面内运动而被逐渐增加。

    Shock protectors for micro-mechanical systems
    100.
    发明申请
    Shock protectors for micro-mechanical systems 失效
    微机械系统的冲击保护器

    公开(公告)号:US20040120058A1

    公开(公告)日:2004-06-24

    申请号:US10726098

    申请日:2003-12-01

    发明人: Haesung Kwon

    IPC分类号: G02B026/08 G02B007/182

    摘要: The present invention is directed towards shock protectors for a pedestal suspended over a lower surface by a plurality of gimbal springs. Each gimbal spring is connected to a linkage arm that attaches to an actuator. A stop located below the bottom of the pedestal prevents the gimbal springs and/or other structures from impacting the lower surface. In addition, the stop prevents excessively high strain in the gimbal springs. A shock absorber extending from at least one linkage arm serves a similar purpose when the pedestal is tilted, rather than simply displaced.

    摘要翻译: 本发明涉及用于通过多个万向节弹簧悬挂在下表面上的基座的防震器。 每个万向节弹簧连接到连接到致动器的连杆臂。 位于基座底部下方的挡块防止万向弹簧和/或其他结构撞击下表面。 此外,挡块可防止万向弹簧产生过大的应变。 从基座倾斜而不是简单地移位时,从至少一个连杆臂延伸的减震器起着类似的作用。