公开(公告)号：US20170062575A1

公开(公告)日：2017-03-02

申请号：US15238721

申请日：2016-08-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： JUNGWOO SONG ,  JAEKYU LEE ,  JAEROK KAHNG ,  YongJun KIM

IPC: H01L29/40 ,  H01L27/22 ,  H01L27/108 ,  H01L29/78 ,  H01L29/66

CPC classification number: H01L29/408 ,  H01L27/10811 ,  H01L27/10823 ,  H01L27/10852 ,  H01L27/10855 ,  H01L27/10891 ,  H01L27/228 ,  H01L29/4236 ,  H01L29/66666 ,  H01L29/7827

Abstract: A semiconductor device includes active pillars protruding from a semiconductor substrate and spaced apart from each other in a first direction and a second direction that is perpendicular to the first direction, a word line extending in the first direction between the active pillars, a drain region disposed in an upper portion of each of the active pillars, and a separation pattern provided between the word line and the drain region. A bottom surface of the separation pattern is disposed at a lower level than a bottom surface of the drain region.

Abstract translation: 半导体器件包括从半导体衬底突出并且在垂直于第一方向的第一方向和第二方向彼此间隔开的有源柱，在有源柱之间沿第一方向延伸的字线，设置的漏极区 在每个活动柱的上部，以及设置在字线和漏区之间的分离图案。 分离图案的底表面设置在比漏区的底表面更低的水平处。