公开(公告)号：US08895226B2

公开(公告)日：2014-11-25

申请号：US14223540

申请日：2014-03-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-Woo Kim ,  Hai-Sub Na ,  Chil-Hee Chung ,  Han-Ku Cho

IPC: G03F7/20 ,  G03F7/038 ,  G03F7/095 ,  G03F7/11 ,  G02B5/20 ,  G02B5/22

CPC classification number: G03F7/0388 ,  G02B5/208 ,  G02B5/22 ,  G03F7/095 ,  G03F7/11

Abstract: Provided are a coating composition for deep ultraviolet (DUV) filtering during an extreme ultraviolet (EUV) exposure, the coating composition including about 100 parts by weight of a solvent including a first solvent (the first solvent being an alcoholic solvent); and about 0.05 parts by weight to about 5 parts by weight of a coating polymer having a degree of absorption of about 50%/μm or greater with respect to 193-nm incident light.

Abstract translation: 提供了一种在极紫外（EUV）暴露期间用于深紫外（DUV）过滤的涂料组合物，该涂料组合物包括约100重量份的包含第一溶剂（第一溶剂为醇溶剂）的溶剂; 和约0.05重量份至约5重量份的相对于193纳米入射光的吸收度为约50％/μm或更大的涂层聚合物。

公开(公告)号：US09431610B2

公开(公告)日：2016-08-30

申请号：US14868350

申请日：2015-09-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Jin Park ,  Yoon-Jong Song ,  Chil-Hee Chung

IPC: H01L45/00 ,  H01L27/24

CPC classification number: H01L45/1683 ,  H01L27/2409 ,  H01L27/2463 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/126 ,  H01L45/1286 ,  H01L45/144 ,  H01L45/16 ,  H01L45/1608

Abstract: A phase change memory device includes a phase change memory unit and a heat sink. The phase change memory unit includes a phase change material layer pattern, a lower electrode beneath the phase change material layer pattern configured to heat the phase change material layer pattern, and an upper electrode on the phase change material layer pattern. The heat sink configured to absorb heat from the phase change memory unit. The heat sink has a top surface lower than a top surface of the upper electrode and is spaced apart from the phase change memory unit.

Abstract translation: 相变存储器件包括相变存储器单元和散热器。 相变存储器单元包括相变材料层图案，被配置为加热相变材料层图案的相变材料层图案下面的下电极和相变材料层图案上的上电极。 散热器被配置成从相变存储器单元吸收热量。 散热器具有比上电极的顶表面低的顶表面，并且与相变存储单元间隔开。