公开(公告)号：US20170328771A1

公开(公告)日：2017-11-16

申请号：US15402751

申请日：2017-01-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Yong JO ,  Young-Joo LEE ,  Chang-Hoon CHOI ,  Jong-Jeong KIM

IPC: G01J3/02

CPC classification number: G01J3/0297 ,  G01J3/28

Abstract: A method of calibrating a measuring apparatus includes determining apparatus parameters that have an influence on a measurement spectrum generated by the measuring apparatus, generating the measurement spectrum by exposing a measurement target on a sample to light generated by the measuring apparatus, calculating an error of the apparatus parameters by comparing the measurement spectrum to an ideal spectrum corresponding to the apparatus parameters, and calibrating the measuring apparatus based on the calculated error of the apparatus parameters.

公开(公告)号：US20140246584A1

公开(公告)日：2014-09-04

申请号：US14060783

申请日：2013-10-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong-Woo HYUN ,  Won-Guk SEO ,  Chang-Hoon CHOI ,  Byeong-Hwan JEON

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/026

Abstract: Provided is a scanning electron microscope capable of collecting electric charges accumulated on a sample. The scanning electron microscope includes a column unit configured to generate an electron beam and scan a sample with the electron beam, a chamber unit combined with the column unit, and including a sample stage spaced apart from an end of the column unit to accommodate the sample therein, a detection unit configured to detect signals emitted from the sample, a charge collecting unit disposed between the end of the column unit and the sample stage to collect electric charges, and a voltage supply unit configured to apply an optimum or, alternatively, desirable voltage to the charge collecting unit.

Abstract translation: 提供能够收集在样品上积累的电荷的扫描型电子显微镜。 扫描电子显微镜包括：柱单元，被配置为产生电子束并用电子束扫描样品，室单元与柱单元组合，并且包括与柱单元的端部间隔开的样品台，以容纳样品 其中，检测单元被配置为检测从样品发射的信号，设置在列单元的端部和样品台之间以收集电荷的电荷收集单元，以及电压供应单元，其被配置为施加最佳或可选的 电压到电荷收集单元。