公开(公告)号：US20170328771A1

公开(公告)日：2017-11-16

申请号：US15402751

申请日：2017-01-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Yong JO ,  Young-Joo LEE ,  Chang-Hoon CHOI ,  Jong-Jeong KIM

IPC: G01J3/02

CPC classification number: G01J3/0297 ,  G01J3/28

Abstract: A method of calibrating a measuring apparatus includes determining apparatus parameters that have an influence on a measurement spectrum generated by the measuring apparatus, generating the measurement spectrum by exposing a measurement target on a sample to light generated by the measuring apparatus, calculating an error of the apparatus parameters by comparing the measurement spectrum to an ideal spectrum corresponding to the apparatus parameters, and calibrating the measuring apparatus based on the calculated error of the apparatus parameters.