公开(公告)号：US20170029958A1

公开(公告)日：2017-02-02

申请号：US15005614

申请日：2016-01-25

Applicant: SAMSUNG DISPLAY CO., LTD. ,  DONGWOO FINE-CHEM CO., LTD.

Inventor： SOOMIN AN ,  YOUNGJUN KIM ,  HONGSICK PARK ,  INSEOL KUK ,  YOUNGCHUL PARK ,  INHO YU ,  SEUNGSOO LEE ,  JONGMUN LEE ,  DAESUNG LIM

IPC: C23F1/18 ,  H01L27/12 ,  H01L21/3213 ,  C23F1/26

Abstract: An etchant composition includes an etchant composition that includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.1 wt % to about 10 wt % of an aliphatic sulfonic acid, about 1 wt % to about 20 wt % of an organic acid or an organic acid salt, and water based on a total weight of the etchant composition.

Abstract translation: 蚀刻剂组合物包括蚀刻剂组合物，其包含约0.5重量％至约20重量％的过硫酸盐，约0.01重量％至约2重量％的氟化合物，约1重量％至约10重量％的无机酸，约 约0.5重量％至约5重量％的环胺化合物，约0.1重量％至约5重量％的氯化合物，约0.1重量％至约10重量％的脂族磺酸，约1重量％至约20重量％ 重量％的有机酸或有机酸盐，以及基于蚀刻剂组合物的总重量的水。

公开(公告)号：US20210225988A1

公开(公告)日：2021-07-22

申请号：US17026604

申请日：2020-09-21

Applicant: Samsung Display Co., Ltd.

Inventor： Gyungmin BAEK ,  Juhyun LEE ,  HONGSICK PARK ,  HYUNEOK SHIN

IPC: H01L27/32 ,  H01L51/56

Abstract: A method of manufacturing a display panel includes forming a circuit layer including a gate, a source, and a drain on a base substrate and forming a light emitting element layer on the circuit layer. The forming of the circuit layer includes sequentially forming a preliminary metal layer, a preliminary oxide layer comprising molybdenum and tantalum, and a preliminary capping layer which comprise a preliminary electrode layer, cleaning the preliminary electrode layer, forming a photoresist layer pattern on the preliminary electrode layer, etching the preliminary electrode layer, and removing the photoresist layer pattern. During the etching of the preliminary electrode layer, a ratio between a removal speed ER1 of the preliminary oxide layer and a removal speed ER2 of the preliminary metal layer satisfies Equation 1 to maintain a low reflection property 1≤ER2/ER1≤3.  [Equation 1]

公开(公告)号：US20150140712A1

公开(公告)日：2015-05-21

申请号：US14318815

申请日：2014-06-30

Applicant: SAMSUNG DISPLAY CO., LTD. ,  DONGWOO FINE-CHEM CO., LTD.

Inventor： Seon-il KIM ,  In-Bae KIM ,  HONGSICK PARK ,  Jong-Hyun CHOUNG ,  Inseol KUK ,  Suckjun LEE ,  Giyong NAM ,  Youngchul PARK ,  Inho YU ,  Youngjin YOON

IPC: C23F1/18 ,  H01L21/3213

CPC classification number: C23F1/18 ,  C09K13/06 ,  C09K13/08 ,  C23F1/26 ,  H01L21/32134 ,  H01L27/124 ,  H01L27/1262

Abstract: An etchant includes, based on a total amount of the etchant, from about 0.5 to about 20 wt % of a persulfate, from about 0.01 to about 2 wt % of a fluorine compound, from about 1 to about 10 wt % of an inorganic acid, from about 0.5 to about 5 wt % of an azole compound, from about 0.1 to about 5 wt % of an electron-donating compound, from about 0.1 to about 5 wt % of a chlorine compound, from about 0.05 to about 3 wt % of a copper salt, from about 0.1 to about 10 wt % of an organic acid or an organic acid salt, and a remaining amount of water.

Abstract translation: 蚀刻剂包括基于蚀刻剂的总量约0.5至约20重量％的过硫酸盐，约0.01至约2重量％的氟化合物，约1至约10重量％的无机酸 ，约0.5至约5重量％的唑化合物，约0.1至约5重量％的给电子化合物，约0.1至约5重量％的氯化合物，约0.05至约3重量％ 的铜盐，约0.1至约10重量％的有机酸或有机酸盐，以及剩余量的水。

公开(公告)号：US20180130908A1

公开(公告)日：2018-05-10

申请号：US15866890

申请日：2018-01-10

Applicant: Samsung Display Co., Ltd.

Inventor： SEUNGHO YOON ,  Bong-Kyun KIM ,  Youngjun KIM ,  HONGSICK PARK ,  Byeong-Beom KIM ,  SANGWON SHIN

IPC: H01L29/786 ,  H01L29/45 ,  H01L21/467 ,  H01L21/465 ,  H01L27/12

CPC classification number: H01L29/7869 ,  G02F1/1368 ,  H01L21/465 ,  H01L21/467 ,  H01L23/53238 ,  H01L27/124 ,  H01L29/45 ,  H01L29/66969 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A thin film transistor substrate includes a thin film transistor including a gate electrode, a semiconductor layer, a source electrode and a drain electrode. Each of the source electrode and the drain electrode includes a wire layer and a protective layer. The protective layer includes zinc oxide in an amount greater than about 70% by weight and less than about 85% by weight and indium oxide in an amount greater than about 15% by weight and less than about 30% by weight.

公开(公告)号：US20160099265A1

公开(公告)日：2016-04-07

申请号：US14964042

申请日：2015-12-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： YEUNTAE KIM ,  HYANG-SHIK KONG ,  NAMSEOK ROH ,  HONGSICK PARK ,  CHANGOH JEONG ,  JINHO JU ,  BYEONG-JIN LEE ,  KYUNGTAE CHAE ,  JISEONG YANG

IPC: H01L27/12 ,  G02F1/1335 ,  G02F1/1333 ,  G02F1/167

CPC classification number: H01L27/1288 ,  G02F1/133377 ,  G02F1/133509 ,  G02F1/133512 ,  G02F1/133516 ,  G02F1/1341 ,  G02F1/136209 ,  G02F1/167 ,  G02F2001/133357 ,  G02F2001/136222 ,  G02F2001/13793 ,  H01L33/08

Abstract: A display apparatus includes a base substrate, a pixel on the base substrate, and a color filter part between the base substrate and the pixel. The pixel includes a cover layer defining a TSC (Tunnel Shaped Cavity) on the base substrate, an image display part provided in the TSC, and first and second electrodes which apply an electric field to the image display part.

Abstract translation: 显示装置包括基底基板，基底基板上的像素以及基底基板与像素之间的滤色器部分。 像素包括在基底基板上限定TSC（隧道形腔）的盖层，设置在TSC中的图像显示部分以及向图像显示部分施加电场的第一和第二电极。