公开(公告)号：US20250043409A1

公开(公告)日：2025-02-06

申请号：US18654289

申请日：2024-05-03

Applicant: Samsung Display Co., Ltd.

Inventor： DONGKIUN SEO ,  MIN-GYU SEO ,  SANGMIN JUNG ,  GANYOUNG PARK ,  CHULHWAN AN ,  HWAPYEONG JEONG

IPC: C23C14/24 ,  C23C14/04 ,  H10K59/12 ,  H10K71/16

Abstract: A deposition apparatus includes a mask frame, a mask disposed on the mask frame, a crucible disposed below the mask frame, and a nozzle coupled to the crucible, and disposed between the crucible and the mask frame. The nozzle includes a body part including a coupling opening, and a spray part disposed in the coupling opening and including a hole overlapping the coupling opening. A thermal expansion coefficient of the spray part is greater than a thermal expansion coefficient of the body part.

公开(公告)号：US20240376589A1

公开(公告)日：2024-11-14

申请号：US18654930

申请日：2024-05-03

Applicant: Samsung Display Co., LTD.

Inventor： SANGMIN JUNG ,  MIN- GYU SEO ,  EUGENE KANG ,  HWAPYEONG JEONG ,  DONGKIUN SEO ,  CHULHWAN AN

IPC: C23C14/24 ,  C23C14/54

Abstract: A deposition source includes a crucible, a plurality of nozzles, a housing, a lower heater module, an upper heater module, a first electrode, a second electrode, and a power supply. The crucible accommodates a deposition material. The plurality of nozzles is disposed on the crucible and spaced apart from each other along a first direction. The housing accommodates the crucible and the plurality of nozzles. The lower heater module is disposed in an inner space of the housing to surround the crucible. The upper heater module is disposed on the lower heater module. The first electrode extends in a second direction crossing the first direction and is connected to the lower heater module. The second electrode extends in the second direction. The second electrode is connected to the upper heater module. The power supply is electrically connected to the first electrode and the second electrode.