公开(公告)号：US20250043409A1

公开(公告)日：2025-02-06

申请号：US18654289

申请日：2024-05-03

Applicant: Samsung Display Co., Ltd.

Inventor： DONGKIUN SEO ,  MIN-GYU SEO ,  SANGMIN JUNG ,  GANYOUNG PARK ,  CHULHWAN AN ,  HWAPYEONG JEONG

IPC: C23C14/24 ,  C23C14/04 ,  H10K59/12 ,  H10K71/16

Abstract: A deposition apparatus includes a mask frame, a mask disposed on the mask frame, a crucible disposed below the mask frame, and a nozzle coupled to the crucible, and disposed between the crucible and the mask frame. The nozzle includes a body part including a coupling opening, and a spray part disposed in the coupling opening and including a hole overlapping the coupling opening. A thermal expansion coefficient of the spray part is greater than a thermal expansion coefficient of the body part.