公开(公告)号：US20240096679A1

公开(公告)日：2024-03-21

申请号：US18469684

申请日：2023-09-19

Applicant: Samsung Display Co., LTD.

Inventor： JUNHYEUK KO ,  MINGOO KANG ,  MINSEOK KIM ,  MINCHUL SONG ,  Sukha Ryu ,  EUIGYU KIM

IPC: H01L21/683 ,  H01L21/68

CPC classification number: H01L21/6833 ,  H01L21/682

Abstract: A substrate loading device includes an electrostatic chuck that chucks a substrate, a mask frame disposed under the electrostatic chuck, and including an edge having a flat top surface, and a plurality of holders disposed between the electrostatic chuck and the mask frame. Each of the plurality of holders includes a first connection part connected to a side of the electrostatic chuck, a second connection part connected to the first connection part and extending in a direction intersecting an extension direction of the first connection part, and a third connection part connected to the second connection part, extending in a direction intersecting an extension direction of the second connection part, and rotationally moving between a first position overlapping the substrate in a thickness direction of the substrate and a second position spaced apart from the substrate.

公开(公告)号：US20240322713A1

公开(公告)日：2024-09-26

申请号：US18396845

申请日：2023-12-27

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  Eui Gyu KIM ,  Sukha RYU ,  SANGHEON JEON

IPC: H02N13/00 ,  B05C13/00 ,  B05C21/00

CPC classification number: H02N13/00 ,  B05C13/00 ,  B05C21/005

Abstract: A thin film deposition apparatus according to an embodiment includes a chamber, a deposition source disposed in a chamber and that supplies a deposition material to the substrate, a mask assembly comprising pattern holes through which the deposition material passes, and an electrostatic chuck facing the mask assembly and that fixes the substrate. The electrostatic chuck comprises a body that supports the substrate, an insulating layer disposed on the body, a first electrode disposed in the insulating layer and spaced apart from the body by a first distance, a second electrode disposed in the insulating layer and spaced apart from the body by a second distance, and a conductive layer disposed in the insulating layer and spaced apart from the body by a third distance. The first electrode and the second electrode are supplied with different voltages, and the third distance is greater than the first distance.

公开(公告)号：US20240068082A1

公开(公告)日：2024-02-29

申请号：US18218485

申请日：2023-07-05

Applicant: Samsung Display Co., LTD.

Inventor： JUNHYEUK KO ,  MINGOO KANG ,  EUIGYU KIM ,  JONGBUM KIM ,  Sukha RYU ,  SANG MIN YI ,  KYUNGHOON CHUNG

IPC: C23C14/04 ,  H10K71/10

CPC classification number: C23C14/042 ,  H10K71/191 ,  H01L21/682

Abstract: A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.

公开(公告)号：US20240226955A9

公开(公告)日：2024-07-11

申请号：US18234937

申请日：2023-08-17

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240146214A1

公开(公告)日：2024-05-02

申请号：US18446274

申请日：2023-08-08

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  JUNHYEUK KO ,  MINGOO KANG ,  EUIGYU KIM ,  Sukha Ryu ,  YOUNGSUN CHO

IPC: H02N13/00 ,  C23C14/50

CPC classification number: H02N13/00 ,  C23C14/50

Abstract: An electrostatic chuck unit includes: a first plate having a first surface and a second surface facing each other and a first hole extending from the first surface to the second surface; a second plate on the first surface of the first plate and having a groove corresponding to the first hole; a coupling bolt inserted into the first hole and the groove; and a height adjusting member spaced apart from the coupling bolt in a plan view.

公开(公告)号：US20240131555A1

公开(公告)日：2024-04-25

申请号：US18234937

申请日：2023-08-16

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240093346A1

公开(公告)日：2024-03-21

申请号：US18468172

申请日：2023-09-15

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  JONGSUNG PARK ,  Sukha RYU ,  SEUNGJU HONG

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24

Abstract: A mask assembly includes a mask, a frame having an external portion surrounding an opening, a mask fixing portion including a long-side stick and a short-side stick for fixing the mask, and a height correcting member connecting the mask fixing portion and the external portion of the frame.