公开(公告)号：US20240011156A1

公开(公告)日：2024-01-11

申请号：US18296499

申请日：2023-04-06

Applicant: Samsung Display Co., LTD.

Inventor： CHOELMIN JANG ,  JUNGGON KIM ,  MYUNGSOO HUH

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/52 ,  C23C16/458

CPC classification number: C23C16/45561 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/52 ,  C23C16/4583

Abstract: A deposition apparatus includes a gas supply including a plurality of gas injection ports, a plate disposed to face the gas supply and to move up and down toward the gas supply, wherein a target substrate is seated on the plate, a body part includes a first portion defining a reaction space between the plate and the gas supply, a second portion disposed below the first portion and defining a lower space, an inner wall spaced apart from the plate, and a plurality of first exhaust parts provided on an outer wall of the first portion.

公开(公告)号：US20210280642A1

公开(公告)日：2021-09-09

申请号：US17135040

申请日：2020-12-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： SUNHEE LEE ,  SUNHO KIM ,  GUNHEE KIM ,  DONGHWAN SHIM ,  TAEHOON YANG ,  CHOELMIN JANG

IPC: H01L27/32 ,  H01L51/52

Abstract: A display device includes a display area and a peripheral area. A display layer includes a plurality of display elements arranged thereon. A thin-film encapsulation layer is arranged on the display layer and includes first, second, and third encapsulation layers. The second encapsulation layer is on the first encapsulation layer. The third encapsulation layer is on the second encapsulation layer. A touch sensing layer is arranged on the thin-film encapsulation layer and includes touch electrodes and trace lines. The display area is partially bent about an axis, and the third encapsulation layer is bent along the axis and has a structure in which a first layer and a second layer are alternately stacked. The first layer includes an inorganic insulating material, and the second layer includes a silicon carbon compound material.

公开(公告)号：US20240218513A1

公开(公告)日：2024-07-04

申请号：US18479214

申请日：2023-10-02

Applicant: Samsung Display Co., LTD.

Inventor： CHOELMIN JANG ,  MYUNGSOO HUH ,  KYUNGJOO MIN ,  MIN-GYU PARK

IPC: C23C16/455 ,  C23C16/44

CPC classification number: C23C16/45561 ,  C23C16/4408 ,  C23C16/45544 ,  C23C16/45565

Abstract: An apparatus for treating a substrate includes a first gas pipe extending in a first direction and including a first injection part and a first exhaust part, a second gas pipe extending in the first direction, spaced apart from the first gas pipe in a second direction intersecting the first direction, and including a second injection part and a second exhaust part, multiple first gas connection pipes extending in the second direction, connected to the first gas pipe, and spaced apart from each other in the first direction, multiple second gas connection pipes extending in the second direction, connected to the second gas pipe, and spaced apart from each other in the first direction, and a gas supply adjacent to the plurality of first gas connection pipes and the plurality of second gas connection pipes.

公开(公告)号：US20250048875A1

公开(公告)日：2025-02-06

申请号：US18922974

申请日：2024-10-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： SUNHEE LEE ,  SUNHO KIM ,  GUNHEE KIM ,  DONGHWAN SHIM ,  TAEHOON YANG ,  CHOELMIN JANG

IPC: H10K59/40 ,  H10K50/844

Abstract: A display device includes a display area and a peripheral area. A display layer includes a plurality of display elements arranged thereon. A thin-film encapsulation layer is arranged on the display layer and includes first, second, and third encapsulation layers. The second encapsulation layer is on the first encapsulation layer. The third encapsulation layer is on the second encapsulation layer. A touch sensing layer is arranged on the thin-film encapsulation layer and includes touch electrodes and trace lines. The display area is partially bent about an axis, and the third encapsulation layer is bent along the axis and has a structure in which a first layer and a second layer are alternately stacked. The first layer includes an inorganic insulating material, and the second layer includes a silicon carbon compound material.

公开(公告)号：US20230203649A1

公开(公告)日：2023-06-29

申请号：US17987374

申请日：2022-11-15

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGGON KIM ,  CHOELMIN JANG ,  MYUNGSOO HUH

IPC: C23C16/44 ,  C23C16/50 ,  C23C16/455 ,  H01J37/32

CPC classification number: C23C16/4405 ,  C23C16/50 ,  C23C16/4412 ,  C23C16/45561 ,  C23C16/45563 ,  H01J37/32357 ,  H01J37/32449 ,  H01J37/32834 ,  H01J2237/3321

Abstract: A substrate processing apparatus includes: a chamber; first and second nozzle units inside the chamber; a remote plasma generator outside the chamber and converting a cleaning gas into a plasma state; a common pipe outside the chamber and connected to the remote plasma generator through which the cleaning gas in the plasma state flows; a first connection pipe connecting the common pipe and the first nozzle unit; a second connection pipe connecting the common pipe and the second nozzle unit; a source gas supply pipe connected to the first connection pipe outside the chamber, supplying a source gas to the first connection pipe, and in which a first supply valve is installed, and a reaction gas supply pipe connected to the second connecting pipe outside the chamber, supplying a reaction gas to the second connection pipe, and in which a second supply valve is installed.

公开(公告)号：US20190237702A1

公开(公告)日：2019-08-01

申请号：US16199848

申请日：2018-11-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： CHOELMIN JANG ,  SUNGHUN KEY ,  JUNGGON KIM ,  MYUNGSOO HUH

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5256 ,  H01L27/3244 ,  H01L51/56 ,  H01L2251/303 ,  H01L2251/5338 ,  H01L2251/558

Abstract: Provided are an encapsulating structure, an organic light-emitting display device including the encapsulating structure, and a method of manufacturing the same. The encapsulating structure includes a first barrier layer including a first inorganic layer having a first thickness; a plasma polymer layer on the first inorganic layer, the plasma polymer layer having a second thickness smaller than or equal to the first thickness; and a second barrier layer including at least one second inorganic layer on the plasma polymer layer. The at least one second inorganic layer has a third thickness, and the third thickness is smaller than or equal to the second thickness.