THIN OXIDE ZERO THRESHOLD VOLTAGE (ZVT) TRANSISTOR FABRICATION

    公开(公告)号:US20180331198A1

    公开(公告)日:2018-11-15

    申请号:US15709332

    申请日:2017-09-19

    Abstract: A method of manufacturing a thin gate oxide N-type metal-oxide-semiconductor (NMOS) zero threshold voltage (ZVT) field effect transistor (FET) and an NMOS medium gate oxide native FET with a semiconductor manufacturing process eliminates the addition of halo masks. In one instance, the method includes selecting a gate stack to create the thin gate oxide NMOS ZVT FET or the NMOS medium gate oxide native FET when combined with blocking a P-type well implant and/or blocking a threshold voltage implant. The method also includes fabricating, on a semiconductor substrate, the selected gate stack. The method further includes blocking the P-type well implant and/or blocking the threshold voltage implant to obtain the thin gate oxide NMOS ZVT FET or the NMOS medium gate oxide native FET.

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