公开(公告)号：US10246796B2

公开(公告)日：2019-04-02

申请号：US15429164

申请日：2017-02-10

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Isao Tashiro ,  Hidenao Kataoka ,  Yoshio Okayama ,  Nobuyuki Yokoyama ,  Yoshifumi Takasu

IPC: C01F17/00 ,  C30B29/22

Abstract: A RAMO4 substrate containing an RAMO4 base material part containing a single crystal represented by the general formula RAMO4 (wherein R represents one or a plurality of trivalent elements selected from a group of elements including: Sc, In, Y, and a lanthanoid element, A represents one or a plurality of trivalent elements selected from a group of elements including: Fe(III), Ga, and Al, and M represents one or a plurality of divalent elements selected from a group of elements including: Mg, Mn, Fe(II), Co, Cu, Zn, and Cd), the RAMO4 base material part having a beveled portion at an edge portion thereof.

公开(公告)号：US10350725B2

公开(公告)日：2019-07-16

申请号：US15424529

申请日：2017-02-03

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Yoshifumi Takasu ,  Yoshio Okayama ,  Akihiko Ishibashi ,  Isao Tashiro ,  Akio Ueta ,  Masaki Nobuoka ,  Naoya Ryoki

IPC: C30B33/00 ,  C30B29/26 ,  C30B29/22 ,  H01L33/00 ,  C01F17/00 ,  B28D5/00 ,  B24B7/22 ,  B24B37/04

Abstract: A RAMO4 substrate is formed from single crystal represented by a formula of RAMO4 (in the formula, R indicates one or a plurality of trivalent elements selected from a group consisting of Sc, In, Y, and a lanthanoid element, A indicates one or a plurality of trivalent elements selected from a group consisting of Fe(III), Ga, and Al, and M indicates one or a plurality of bivalent elements selected form a group consisting of Hg, Mn, Fe(II), Co, Cu, Zn, and Cd). An epitaxially-grown surface is provided on at least one surface of the RAMO4 substrate. The epitaxially-grown surface includes a plurality of cleavage surfaces which are regularly distributed, and are separated from each other.

公开(公告)号：US11370076B2

公开(公告)日：2022-06-28

申请号：US15424244

申请日：2017-02-03

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Yoshifumi Takasu ,  Yoshio Okayama ,  Akihiko Ishibashi ,  Isao Tashiro ,  Akio Ueta ,  Masaki Nobuoka ,  Naoya Ryoki

IPC: C30B29/22 ,  B24B7/22 ,  C30B33/00

Abstract: A RAMO4 substrate includes a single crystal represented by a formula of RAMO4 (in the formula, R indicates one or a plurality of trivalent elements selected from a group consisting of Sc, In, Y, and a lanthanoid element, A indicates one or a plurality of trivalent elements selected from a group consisting of Fe(III), Ga, and Al, and M indicates one or a plurality of bivalent elements selected from a group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd). An epitaxially-grown surface is provided on one surface of the RAMO4 substrate, a satin-finish surface is provided on another surface. The satin-finish surface has surface roughness which is larger than that of the epitaxially-grown surface.