知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

7 records (took 0.013 seconds)

    Gap compensation mechanism for self adaptive posture adjustment
    1.
    发明授权
    Gap compensation mechanism for self adaptive posture adjustment 有权

    公开(公告)号：US10025058B2

    公开(公告)日：2018-07-17

    申请号：US14512591

    申请日：2014-10-13

    Applicant: National Applied Research Laboratories

    Inventor： Wei-Cheng Lin ,  Shenq-Tsong Chang ,  Hsu-Pin Pan ,  Ting-Ming Huang ,  Shih-Feng Tseng

    IPC: G02B7/00 ,  G02B7/02

    Abstract: A gap compensation mechanism capable of self adaptive posture adjustment is disclosed, which comprises a base seat, having at least a fixation portion disposed thereon, the fixation portion having a flow path area disposed peripheral thereto; at least an adjustment unit, sleeved onto an outer rim of the fixation portion; and a filler, being filled within the flow path area. As such, a workpiece to be fixed may be disposed on a face of an adjustment unit. Further, the adjustment unit provides at least three freedoms for the altitude and two axial inclinations for self adaptively compensating a gap with any geometrical shapes and thus further adjusting the posture of the combined workpiece. After all the adjustments, a filler is filled to reinforce the structure and finally a fixation unit is employed for locking and fixing.

    Gap Compensation Mechanism for Self Adaptive Posture Adjustment
    3.
    发明申请
    Gap Compensation Mechanism for Self Adaptive Posture Adjustment 有权
    自适应姿态调整差距补偿机制

    公开(公告)号：US20160103293A1

    公开(公告)日：2016-04-14

    申请号：US14512591

    申请日：2014-10-13

    Applicant: National Applied Research Laboratories

    Inventor： Wei-Cheng Lin ,  Shenq-Tsong Chang ,  Hsu-Pin Pan ,  Ting-Ming Huang ,  Shih-Feng Tseng

    IPC: G02B7/00 ,  G02B7/02

    CPC classification number: G02B7/003 ,  G02B7/025 ,  G02B7/026

    Abstract: A gap compensation mechanism capable of self adaptive posture adjustment is disclosed, which comprises a base seat, having at least a fixation portion disposed thereon, the fixation portion having a flow path area disposed peripheral thereto; at least an adjustment unit, sleeved onto an outer rim of the fixation portion; and a filler, being filled within the flow path area. As such, a workpiece to be fixed may be disposed on a face of an adjustment unit. Further, the adjustment unit provides at least three freedoms for the altitude and two axial inclinations for self adaptively compensating a gap with any geometrical shapes and thus further adjusting the posture of the combined workpiece. After all the adjustments, a filler is filled to reinforce the structure and finally a fixation unit is employed for locking and fixing.

    Abstract translation: 公开了一种能够进行自适应姿势调整的间隙补偿机构，其包括基座，至少具有固定部，所述固定部具有设置在其周围的流路区域; 至少一个调节单元，套在所述固定部分的外缘上; 和填充物，填充在流路区域内。 这样，待固定的工件可以设置在调整单元的表面上。 此外，调节单元为高度提供至少三个自由度和两个轴向倾斜度，以自适应地补偿具有任何几何形状的间隙，从而进一步调整组合的工件的姿态。 经过所有调整，填充填料以加固结构，最后采用固定单元进行锁定和固定。

    Conjugate common optical path lithography lens
    5.
    发明授权
    Conjugate common optical path lithography lens 有权

    公开(公告)号：US09891533B2

    公开(公告)日：2018-02-13

    申请号：US14740445

    申请日：2015-06-16

    Applicant: National Applied Research Laboratories

    Inventor： Jiun-Woei Huang ,  Shih-Feng Tseng ,  Jer-Liang Yeh

    IPC: G02B17/00 ,  G03F7/20 ,  G02B13/22 ,  G02B17/08 ,  G02B13/18

    CPC classification number: G03F7/7015 ,  G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G03F7/70225

    Abstract: A conjugate common light path lithography lens set includes a first, second, third, and fourth spherical mirrors, arranged sequentially, a spherical reflecting mirror arranged below the fourth spherical mirror, a first and second planar reflecting mirrors, inclinedly arranged above the first spherical mirror, so that a conjugate telecentric component pattern is formed to maintain an pattern of an object to have a non-deformed pattern after experiencing these optical components. As such, the omni-spherical mirror set and two kinds of optical material are mutually arranged to form the novel conjugate common light path lithography lens set. This may further achieve the function of the lithography lens, and have a direct effect on the manufacturing cost. And, the efficacies of reduced component number, easier manufacture of the optical components (satisfied with the lens manufacturing's experience equation), easier calibration, reduced chromatic abberation, optimized aperature F/#, and a reduced cost may be achieved.

    Conjugate Common Optical Path Lithography Lens
    6.
    发明申请
    Conjugate Common Optical Path Lithography Lens 有权
    共轭光路平版镜

    公开(公告)号：US20160370564A1

    公开(公告)日：2016-12-22

    申请号：US14740445

    申请日：2015-06-16

    Applicant: National Applied Research Laboratories

    Inventor： Jiun-Woei Huang ,  Shih-Feng Tseng ,  Jer-Liang Yeh

    IPC: G02B17/08 ,  G03F7/20 ,  G02B27/00

    CPC classification number: G03F7/7015 ,  G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G03F7/70225

    Abstract: A conjugate common light path lithography lens set includes a first, second, third, and fourth spherical mirrors, arranged sequentially, a spherical reflecting mirror arranged below the fourth spheircal mirror, a first and second planar reflecting mirrors, inclinedly arranged above the first spherical mirror, so that a conjugate telecentric component pattern is formed to maintain an pattern of an object to have a non-deformed pattern after experiencing these optical components. As such, the omni-spherical mirror set and two kinds of optical material are mutually arranged to form the novel conjugate common light path lithography lens set. This may further achieve the function of the lithography lens, and have a direct effect on the manufacturing cost. And, the efficacies of reduced component number, easier manufacture of the optical components (satisfied with the lens manufacturing's experience equation), easier calibration, reduced chromatic abberation, optimized aperature F/#, and a reduced cost may be achieved.

    Abstract translation: 共轭共同光路光刻透镜组包括依次布置的第一，第二，第三和第四球面镜，布置在第四半球镜下方的球面反射镜，倾斜地布置在第一球面镜上方的第一和第二平面反射镜 ，使得形成共轭远心分量图案，以在经历这些光学部件之后保持物体的图案具有未变形的图案。 因此，全球镜组和两种光学材料相互排列，形成新型共轭普通光路光刻透镜组。 这可以进一步实现光刻透镜的功能，并且直接影响制造成本。 并且，可以实现减少的部件数量，更容易制造光学部件（满足透镜制造经验方程式），更容易的校准，减少色彩偏差，优化的温度F /＃和降低成本的功效。

    Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface
    7.
    发明申请
    Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface 有权
    具有单个非球面的普通光学元件曝光镜头组

    公开(公告)号：US20160370563A1

    公开(公告)日：2016-12-22

    申请号：US14741550

    申请日：2015-06-17

    Applicant: National Applied Research Laboratories

    Inventor： Jiun-Woei Huang ,  Shih-Feng Tseng ,  Jer-Liang Andrew Yeh

    IPC: G02B17/08 ,  G02B27/00 ,  G03F7/20 ,  G02B13/18

    CPC classification number: G02B17/0832 ,  G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G02B27/0025 ,  G03F7/7015 ,  G03F7/70225

    Abstract: A common optical components exposer lens set having a single non-spherical surface, comprising a common optical element set, comprising a first, second, and third lens arranged sequentially; a spherical reflecting mirror, arranged below the third spherical lens; and a planar reflecting lens, comprising a first and second planar reflecting, inclinedly arranged above the first lens, so that an equi-multiplication exposer lens set is formed by the spherical mirror set, so as to impinge a pattern on an object onto a photosensitive surface. As such, a single non-spherical surface and overlapping assembly, composed of three lenses having the single non-spherical surface and a spherical reflecting lens and two planar reflecting lenses overlapping together, in which two optical material types are arranged with respect to each other.

    Abstract translation: 具有单个非球面的普通光学部件曝光透镜组包括共同的光学元件组，包括依次布置的第一，第二和第三透镜; 布置在第三球面透镜下方的球面反射镜; 以及平面反射透镜，包括倾斜地布置在第一透镜上方的第一和第二平面反射镜，使得通过球面镜组形成等倍曝光透镜组，以便将物体上的图案撞击到感光体上 表面。 这样，由具有单个非球面的三个透镜和球面反射透镜和两个重叠在一起的平面反射透镜组成的单个非球形表面和重叠组件，其中两个光学材料类型相对于彼此布置 。

Patent Agency Ranking