Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface
    3.
    发明申请
    Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface 有权
    具有单个非球面的普通光学元件曝光镜头组

    公开(公告)号:US20160370563A1

    公开(公告)日:2016-12-22

    申请号:US14741550

    申请日:2015-06-17

    Abstract: A common optical components exposer lens set having a single non-spherical surface, comprising a common optical element set, comprising a first, second, and third lens arranged sequentially; a spherical reflecting mirror, arranged below the third spherical lens; and a planar reflecting lens, comprising a first and second planar reflecting, inclinedly arranged above the first lens, so that an equi-multiplication exposer lens set is formed by the spherical mirror set, so as to impinge a pattern on an object onto a photosensitive surface. As such, a single non-spherical surface and overlapping assembly, composed of three lenses having the single non-spherical surface and a spherical reflecting lens and two planar reflecting lenses overlapping together, in which two optical material types are arranged with respect to each other.

    Abstract translation: 具有单个非球面的普通光学部件曝光透镜组包括共同的光学元件组,包括依次布置的第一,第二和第三透镜; 布置在第三球面透镜下方的球面反射镜; 以及平面反射透镜,包括倾斜地布置在第一透镜上方的第一和第二平面反射镜,使得通过球面镜组形成等倍曝光透镜组,以便将物体上的图案撞击到感光体上 表面。 这样,由具有单个非球面的三个透镜和球面反射透镜和两个重叠在一起的平面反射透镜组成的单个非球形表面和重叠组件,其中两个光学材料类型相对于彼此布置 。

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