公开(公告)号：US09891533B2

公开(公告)日：2018-02-13

申请号：US14740445

申请日：2015-06-16

Applicant: National Applied Research Laboratories

Inventor： Jiun-Woei Huang ,  Shih-Feng Tseng ,  Jer-Liang Yeh

IPC: G02B17/00 ,  G03F7/20 ,  G02B13/22 ,  G02B17/08 ,  G02B13/18

CPC classification number: G03F7/7015 ,  G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G03F7/70225

Abstract: A conjugate common light path lithography lens set includes a first, second, third, and fourth spherical mirrors, arranged sequentially, a spherical reflecting mirror arranged below the fourth spherical mirror, a first and second planar reflecting mirrors, inclinedly arranged above the first spherical mirror, so that a conjugate telecentric component pattern is formed to maintain an pattern of an object to have a non-deformed pattern after experiencing these optical components. As such, the omni-spherical mirror set and two kinds of optical material are mutually arranged to form the novel conjugate common light path lithography lens set. This may further achieve the function of the lithography lens, and have a direct effect on the manufacturing cost. And, the efficacies of reduced component number, easier manufacture of the optical components (satisfied with the lens manufacturing's experience equation), easier calibration, reduced chromatic abberation, optimized aperature F/#, and a reduced cost may be achieved.

公开(公告)号：US20160370564A1

公开(公告)日：2016-12-22

申请号：US14740445

申请日：2015-06-16

Applicant: National Applied Research Laboratories

Inventor： Jiun-Woei Huang ,  Shih-Feng Tseng ,  Jer-Liang Yeh

IPC: G02B17/08 ,  G03F7/20 ,  G02B27/00

CPC classification number: G03F7/7015 ,  G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G03F7/70225

Abstract: A conjugate common light path lithography lens set includes a first, second, third, and fourth spherical mirrors, arranged sequentially, a spherical reflecting mirror arranged below the fourth spheircal mirror, a first and second planar reflecting mirrors, inclinedly arranged above the first spherical mirror, so that a conjugate telecentric component pattern is formed to maintain an pattern of an object to have a non-deformed pattern after experiencing these optical components. As such, the omni-spherical mirror set and two kinds of optical material are mutually arranged to form the novel conjugate common light path lithography lens set. This may further achieve the function of the lithography lens, and have a direct effect on the manufacturing cost. And, the efficacies of reduced component number, easier manufacture of the optical components (satisfied with the lens manufacturing's experience equation), easier calibration, reduced chromatic abberation, optimized aperature F/#, and a reduced cost may be achieved.

Abstract translation: 共轭共同光路光刻透镜组包括依次布置的第一，第二，第三和第四球面镜，布置在第四半球镜下方的球面反射镜，倾斜地布置在第一球面镜上方的第一和第二平面反射镜 ，使得形成共轭远心分量图案，以在经历这些光学部件之后保持物体的图案具有未变形的图案。 因此，全球镜组和两种光学材料相互排列，形成新型共轭普通光路光刻透镜组。 这可以进一步实现光刻透镜的功能，并且直接影响制造成本。 并且，可以实现减少的部件数量，更容易制造光学部件（满足透镜制造经验方程式），更容易的校准，减少色彩偏差，优化的温度F /＃和降低成本的功效。