公开(公告)号：US20080218560A1

公开(公告)日：2008-09-11

申请号：US12041897

申请日：2008-03-04

申请人： Motohisa NOGUCHI ,  Xiaoxing WANG

发明人： Motohisa NOGUCHI ,  Xiaoxing WANG

IPC分类号： H01L41/083 ,  H01L41/187 ,  B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/187

摘要： A piezoelectric element includes: a first electrode formed above a base substrate; a piezoelectric layer formed above the first electrode; and a second electrode formed above the piezoelectric layer, wherein the piezoelectric layer has a plurality of voids.

摘要翻译： 压电元件包括​​：形成在基底基板上的第一电极; 形成在所述第一电极上方的压电层; 以及形成在所述压电层上方的第二电极，其中所述压电层具有多个空隙。

公开(公告)号：US20110003073A1

公开(公告)日：2011-01-06

申请号：US12829970

申请日：2010-07-02

申请人： Motohisa NOGUCHI

发明人： Motohisa NOGUCHI

IPC分类号： B05D5/12

CPC分类号： B41J2/161 ,  B41J2/1645 ,  C23C18/1216 ,  C23C18/1295 ,  H01L41/1876 ,  H01L41/318

摘要： A method for forming a piezoelectric thin film includes applying a colloid solution onto a substrate, forming a dried film by drying the colloid solution, forming an inorganic film by degreasing the dried film, and crystallizing the inorganic film. The colloid solution contains lead acetate as a material of lead oxide, an organic metal compound as a material of metal oxides other than lead oxide, a carboxylic acid, and polyethylene glycol.

摘要翻译： 形成压电薄膜的方法包括将胶体溶液涂布在基板上，通过干燥胶体溶液形成干燥膜，通过使干燥的膜脱脂并使无机膜结晶而形成无机膜。 胶体溶液含有作为氧化铅的材料的乙酸铅，作为除氧化铅以外的金属氧化物的材料的有机金属化合物，羧酸和聚乙二醇。

公开(公告)号：US20130112910A1

公开(公告)日：2013-05-09

申请号：US13462038

申请日：2012-05-02

申请人： Motohisa NOGUCHI ,  Reina HIROSE ,  Miwa TAKUBO ,  Ichiro ASAOKA ,  Toshiya ONODERA

发明人： Motohisa NOGUCHI ,  Reina HIROSE ,  Miwa TAKUBO ,  Ichiro ASAOKA ,  Toshiya ONODERA

IPC分类号： C04B35/106

CPC分类号： C23C18/1216 ,  H01L41/0973 ,  H01L41/317

摘要： Some kinds of carboxylic acids have a stabilizing effect on metal alkoxides and, in a precursor solution, are unlikely to cause a reduced storage stability and an increased viscosity of the precursor solution even when their content is increased; they can be used in the solvent component of the precursor solution. The carboxylic acid content is preferably in a range of 20% by mass to 60% by mass, both inclusive, of the total amount of the raw materials used to prepare the precursor solution. The carboxylic acid component prevents the hydrolysis due to the moisture in the air when the carboxylic acid content is equal to or more than 20% by mass. When the carboxylic acid content is equal to or less than 60% by mass, furthermore, the resulting precursor film will have a sufficiently large thickness.

摘要翻译： 一些种类的羧酸对金属醇盐具有稳定的作用，而且在前体溶液中，即使其前体溶液的含量增加，也不太可能引起降低的储存稳定性和前体溶液的粘度增加; 它们可以用于前体溶液的溶剂组分中。 羧酸含量优选为用于制备前体溶液的原料总量的20质量％至60质量％的范围。 当羧酸含量等于或大于20质量％时，羧酸组分防止由于空气中的水分导致的水解。 此外，当羧酸含量等于或小于60质量％时，所得前体膜将具有足够大的厚度。

公开(公告)号：US20090044390A1

公开(公告)日：2009-02-19

申请号：US12167930

申请日：2008-07-03

申请人： Akira KURIKI ,  Koji SUMI ,  Hironobu KAZAMA ,  Motoki TAKABE ,  Motohisa NOGUCHI

发明人： Akira KURIKI ,  Koji SUMI ,  Hironobu KAZAMA ,  Motoki TAKABE ,  Motohisa NOGUCHI

IPC分类号： H01L41/22

CPC分类号： H01L41/318 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C18/1216 ,  C23C18/1283 ,  H01L41/0973 ,  H01L41/1876 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49155

摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].

摘要翻译： 一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤，其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤 并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃至170℃的温度下干燥该电介质前体膜 在脱脂温度为350℃〜450℃，升温速度为15℃/秒以上的条件下进行脱脂工序，烧成工序在加热 升速率为100 [℃/秒]至150℃/秒。