公开(公告)号：US20130112910A1

公开(公告)日：2013-05-09

申请号：US13462038

申请日：2012-05-02

申请人： Motohisa NOGUCHI ,  Reina HIROSE ,  Miwa TAKUBO ,  Ichiro ASAOKA ,  Toshiya ONODERA

发明人： Motohisa NOGUCHI ,  Reina HIROSE ,  Miwa TAKUBO ,  Ichiro ASAOKA ,  Toshiya ONODERA

IPC分类号： C04B35/106

CPC分类号： C23C18/1216 ,  H01L41/0973 ,  H01L41/317

摘要： Some kinds of carboxylic acids have a stabilizing effect on metal alkoxides and, in a precursor solution, are unlikely to cause a reduced storage stability and an increased viscosity of the precursor solution even when their content is increased; they can be used in the solvent component of the precursor solution. The carboxylic acid content is preferably in a range of 20% by mass to 60% by mass, both inclusive, of the total amount of the raw materials used to prepare the precursor solution. The carboxylic acid component prevents the hydrolysis due to the moisture in the air when the carboxylic acid content is equal to or more than 20% by mass. When the carboxylic acid content is equal to or less than 60% by mass, furthermore, the resulting precursor film will have a sufficiently large thickness.

摘要翻译： 一些种类的羧酸对金属醇盐具有稳定的作用，而且在前体溶液中，即使其前体溶液的含量增加，也不太可能引起降低的储存稳定性和前体溶液的粘度增加; 它们可以用于前体溶液的溶剂组分中。 羧酸含量优选为用于制备前体溶液的原料总量的20质量％至60质量％的范围。 当羧酸含量等于或大于20质量％时，羧酸组分防止由于空气中的水分导致的水解。 此外，当羧酸含量等于或小于60质量％时，所得前体膜将具有足够大的厚度。