公开(公告)号：US10166400B2

公开(公告)日：2019-01-01

申请号：US14538154

申请日：2014-11-11

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Keon Jae Lee ,  Myung Hwan Byun ,  Kwi Il Park ,  Geon Tae Hwang ,  Chang Kyu Chung

IPC: A61N1/00 ,  B32B38/00 ,  H01L41/08 ,  A61N1/378 ,  B32B38/10 ,  A61N1/36 ,  H01L41/113 ,  H01L41/312 ,  B82Y40/00 ,  A61N1/375 ,  A61N1/05

Abstract: Provided is a method for separating a nanogenerator, which includes laminating a buffer layer on a sacrificial substrate, making a nanogenerator on the buffer layer, laminating a metal layer on the nanogenerator and separating the nanogenerator from the buffer layer.Here, a nanogenerator is separated by using a stress difference between the sacrificial substrate and the metal layer, instead of an existing method in which a nanogenerator is separated from the sacrificial substrate by means of wet etching or the like. In particular, according to a difference between a tensile stress at the metal layer such as nickel and a compressive stress at the lower silicon substrate, the nanogenerator is intactly separated from the silicon oxide layer serving as a buffer layer. Therefore, the nanogenerator may be separated from the sacrificial substrate in a mechanical way, which is safer and more economic in comparison to an existing chemical separation method using an etching solution. Further, it is also possible to avoid a damage of the nanogenerator caused by an etching solution.

公开(公告)号：US20150224324A1

公开(公告)日：2015-08-13

申请号：US14538154

申请日：2014-11-11

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Keon Jae LEE ,  Myung Hwan Byun ,  Kwi II Park ,  Geon Tae Hwang ,  Chang Kyu Chung

IPC: A61N1/378 ,  B32B38/10 ,  B32B37/24 ,  H02N2/18 ,  A61N1/36

CPC classification number: A61N1/3785 ,  A61N1/0551 ,  A61N1/3605 ,  A61N1/36125 ,  A61N1/3756 ,  B32B38/10 ,  B32B2457/00 ,  B82Y40/00 ,  H01L41/113 ,  H01L41/312 ,  Y10S322/00 ,  Y10S977/948

Abstract: Provided is a method for separating a nanogenerator, which includes laminating a buffer layer on a sacrificial substrate, making a nanogenerator on the buffer layer, laminating a metal layer on the nanogenerator and separating the nanogenerator from the buffer layer.Here, a nanogenerator is separated by using a stress difference between the sacrificial substrate and the metal layer, instead of an existing method in which a nanogenerator is separated from the sacrificial substrate by means of wet etching or the like. In particular, according to a difference between a tensile stress at the metal layer such as nickel and a compressive stress at the lower silicon substrate, the nanogenerator is intactly separated from the silicon oxide layer serving as a buffer layer. Therefore, the nanogenerator may be separated from the sacrificial substrate in a mechanical way, which is safer and more economic in comparison to an existing chemical separation method using an etching solution. Further, it is also possible to avoid a damage of the nanogenerator caused by an etching solution.

Abstract translation: 提供一种分离纳米发生器的方法，其包括在牺牲基板上层叠缓冲层，在缓冲层上形成纳米发生器，在纳米发生器上层压金属层并将纳米发生器与缓冲层分离。 这里，通过使用牺牲基板和金属层之间的应力差来分离纳米发生器，而不是通过湿蚀刻等将纳米发生器与牺牲基板分离的现有方法。 特别地，根据镍等金属层的拉伸应力与下硅基板的压缩应力之间的差异，纳米发生器与作为缓冲层的氧化硅层完全分离。 因此，纳米发生器可以以机械方式与牺牲衬底分离，与使用蚀刻溶液的现有化学分离方法相比，其更安全并且更经济。 此外，还可以避免由蚀刻溶液引起的纳米发生器的损坏。