公开(公告)号：US10190868B2

公开(公告)日：2019-01-29

申请号：US14826079

申请日：2015-08-13

Applicant: KLA-Tencor Corporation

Inventor： Liequan Lee ,  Raphael Jean Michel Marie Getin ,  Meng Cao ,  Leonid Poslavsky ,  Torsten Rudolf Kaack ,  Hong Qiu

IPC: G01B11/02 ,  G06N5/02 ,  G03F7/20

Abstract: A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing.

公开(公告)号：US20160320315A1

公开(公告)日：2016-11-03

申请号：US14826079

申请日：2015-08-13

Applicant: KLA-Tencor Corporation

Inventor： Liequan Lee ,  Raphael Jean Michel Marie Getin ,  Meng Cao ,  Leonid Poslavsky ,  Torsten Rudolf Kaack ,  Hong Qiu

IPC: G01N21/95 ,  G01B11/02

CPC classification number: G01B11/02 ,  G03F7/70625 ,  G06N5/02

Abstract: A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing.

Abstract translation: 提供了一种使用库之间自动转换并利用回归进行测量处理的计量系统，方法和计算机程序产品。 在使用中，由计量系统确定满足预定条件。 响应于确定已经满足预定条件，计量系统在利用库和利用用于测量处理的回归之间自动转换。