公开(公告)号：US10062157B2

公开(公告)日：2018-08-28

申请号：US15342432

申请日：2016-11-03

Applicant: KLA-Tencor Corporation

Inventor： Stilian Ivanov Pandev ,  Alexander Kuznetsov ,  Gregory R. Brady ,  Andrei V. Shchegrov ,  Noam Sapiens ,  John J. Hench

IPC: G01N21/25 ,  G01N21/84 ,  G06T7/00 ,  G01N21/21 ,  G03F7/20 ,  G06T7/60

CPC classification number: G06T7/0004 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/255 ,  G01N21/84 ,  G01N21/8422 ,  G01N2201/06113 ,  G03F7/70625 ,  G03F7/70633 ,  G06T7/60 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A plurality of collection patterns are defined for a spatial light beam controller positioned at a pupil image plane of a metrology tool. For each collection pattern, a signal is collected from a sensor of the metrology tool, and each collected signal represents a combination of a plurality of signals that the spatial light beam controller samples, using each collection pattern, from a pupil image of the target of interest. The collection patterns are selected so that the pupil image is reconstructable based on the collection patterns and their corresponding collection signals. The collected signal for each of the collection patterns is analyzed to determine a structure or process parameter value for the target of interest.

公开(公告)号：US09518916B1

公开(公告)日：2016-12-13

申请号：US14511810

申请日：2014-10-10

Applicant: KLA-Tencor Corporation

Inventor： Stilian Ivanov Pandev ,  Alexander Kuznetsov ,  Gregory R. Brady ,  Andrei V. Shchegrov ,  Noam Sapiens ,  John J. Hench

IPC: G01N21/25 ,  G01N21/84

CPC classification number: G06T7/0004 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/255 ,  G01N21/84 ,  G01N21/8422 ,  G01N2201/06113 ,  G03F7/70625 ,  G03F7/70633 ,  G06T7/60 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A plurality of collection patterns are defined for a spatial light beam controller positioned at a pupil image plane of a metrology tool. For each collection pattern, a signal is collected from a sensor of the metrology tool, and each collected signal represents a combination of a plurality of signals that the spatial light beam controller samples, using each collection pattern, from a pupil image of the target of interest. The collection patterns are selected so that the pupil image is reconstructable based on the collection patterns and their corresponding collection signals. The collected signal for each of the collection patterns is analyzed to determine a structure or process parameter value for the target of interest.

Abstract translation: 公开了用于确定半导体晶片上的感兴趣的目标的结构或过程参数值的装置和方法。 为位于计量工具的光瞳像平面处的空间光束控制器定义了多个收集图案。 对于每个收集图案，从计量工具的传感器收集信号，并且每个收集的信号表示多个信号的组合，空间光束控制器使用每个收集模式从目标的瞳孔图像 利益。 选择收集图案，使得基于收集图案及其对应的收集信号可以重建瞳孔图像。 分析每个收集模式的收集信号，以确定感兴趣的目标的结构或过程参数值。

公开(公告)号：US20140240951A1

公开(公告)日：2014-08-28

申请号：US13774025

申请日：2013-02-22

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: F21V13/08 ,  F21V13/00 ,  F21V8/00 ,  F21V13/12

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 本公开涉及用于向用于光学测量的测量头提供照明的系统。 在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。 在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。 在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：US20170146399A1

公开(公告)日：2017-05-25

申请号：US15369560

申请日：2016-12-05

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick A. Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: G01J3/10 ,  H01J65/04 ,  G01J3/02 ,  G02B6/293 ,  G01J3/12

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：US09512985B2

公开(公告)日：2016-12-06

申请号：US13774025

申请日：2013-02-22

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: F21S8/10 ,  F21V13/08 ,  F21V13/00 ,  F21V13/12 ,  G02B6/35 ,  G02B6/293

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 本公开涉及用于向用于光学测量的测量头提供照明的系统。 在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。 在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。 在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：US10527830B2

公开(公告)日：2020-01-07

申请号：US15391375

申请日：2016-12-27

Applicant: KLA-Tencor Corporation

Inventor： Andrew V. Hill ,  Gregory R. Brady

IPC: G02B17/00 ,  G02B17/02 ,  G02B17/06 ,  G02B21/16 ,  G02B21/36 ,  G02B27/00

Abstract: An optical relay system includes four or more reflective optical elements oriented in a tilted configuration. Each of the four or more reflective optical elements is tilted about one of four or more tilt axes. Further, the four or more tilt axes are oriented to correct for aberrations induced by the tilted configuration.

公开(公告)号：US10203247B2

公开(公告)日：2019-02-12

申请号：US15369560

申请日：2016-12-05

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick A. Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: H01J65/04 ,  G01J3/02 ,  G01J3/10 ,  F21V13/08 ,  F21V13/00 ,  F21V13/12 ,  G02B6/35 ,  G02B6/293 ,  G01J3/12

Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：US20180045932A1

公开(公告)日：2018-02-15

申请号：US15391375

申请日：2016-12-27

Applicant: KLA-Tencor Corporation

Inventor： Andrew V. Hill ,  Gregory R. Brady

IPC: G02B17/00 ,  G02B17/06 ,  G02B21/36 ,  G02B27/00 ,  G02B17/02

CPC classification number: G02B17/008 ,  G02B17/023 ,  G02B17/0657 ,  G02B17/0663 ,  G02B21/16 ,  G02B21/361 ,  G02B27/0025

Abstract: An optical relay system includes four or more reflective optical elements oriented in a tilted configuration. Each of the four or more reflective optical elements is tilted about one of four or more tilt axes. Further, the four or more tilt axes are oriented to correct for aberrations induced by the tilted configuration.

公开(公告)号：US20170076440A1

公开(公告)日：2017-03-16

申请号：US15342432

申请日：2016-11-03

Applicant: KLA-Tencor Corporation

Inventor： Stilian Ivanov Pandev ,  Alexander Kuznetsov ,  Gregory R. Brady ,  Andrei V. Shchengrov ,  Noam Sapiens ,  John J. Hench

IPC: G06T7/00 ,  G06T7/60

CPC classification number: G06T7/0004 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/255 ,  G01N21/84 ,  G01N21/8422 ,  G01N2201/06113 ,  G03F7/70625 ,  G03F7/70633 ,  G06T7/60 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A plurality of collection patterns are defined for a spatial light beam controller positioned at a pupil image plane of a metrology tool. For each collection pattern, a signal is collected from a sensor of the metrology tool, and each collected signal represents a combination of a plurality of signals that the spatial light beam controller samples, using each collection pattern, from a pupil image of the target of interest. The collection patterns are selected so that the pupil image is reconstructable based on the collection patterns and their corresponding collection signals. The collected signal for each of the collection patterns is analyzed to determine a structure or process parameter value for the target of interest.

Abstract translation: 公开了用于确定半导体晶片上的感兴趣的目标的结构或过程参数值的装置和方法。 为位于计量工具的光瞳像平面处的空间光束控制器定义了多个收集图案。 对于每个收集图案，从计量工具的传感器收集信号，并且每个收集的信号表示多个信号的组合，空间光束控制器使用每个收集模式从目标的瞳孔图像 利益。 选择收集图案，使得基于收集图案及其对应的收集信号可以重建瞳孔图像。 分析每个收集模式的收集信号，以确定感兴趣的目标的结构或过程参数值。