公开(公告)号：US20210288459A1

公开(公告)日：2021-09-16

申请号：US17337906

申请日：2021-06-03

Applicant: Gigaphoton Inc.

Inventor： Yuki TAMARU ,  Taisuke MIURA

IPC: H01S3/038 ,  H01S3/02

Abstract: A laser system includes a random phase plate in an optical path between a solid-state laser device and an excimer amplifier. Cells of a predetermined shape are periodically arranged on the plate, each cell being a minimum unit region of an irregular pattern, regions of depressions or projections in units of the cells being randomly arranged. When a traveling direction of a laser beam is a Z direction, a discharge direction is a V direction, a direction orthogonal to the V and Z directions is an H direction, an in-plane direction of the plate corresponding to the V direction is a first direction, an in-plane direction of the plate corresponding to the H direction is a second direction, lengths of the cell are d1 in the first direction and d2 in the second direction, an aspect ratio of the cell defined by d2/d1 is 1.2 or more.

公开(公告)号：US20210226411A1

公开(公告)日：2021-07-22

申请号：US17220993

申请日：2021-04-02

Applicant: Gigaphoton Inc.

Inventor： Taisuke MIURA ,  Takashi ONOSE ,  Osamu WAKABAYASHI

IPC: H01S5/00 ,  H01S5/50 ,  H01S5/042

Abstract: A laser system according to one aspect of the present disclosure includes a wavelength-variable first solid-state laser device configured to output a first pulse laser beam; a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal; an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system; and a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, control a wavelength of the first pulse laser beam in accordance with the instructed target center wavelength, and control the first incident angle on the first nonlinear crystal in accordance with an average value of the target center wavelength.

公开(公告)号：US20210194215A1

公开(公告)日：2021-06-24

申请号：US17192205

申请日：2021-03-04

Applicant: Gigaphoton Inc.

Inventor： Taisuke MIURA ,  Osamu WAKABAYASHI

IPC: H01S5/40 ,  H01S5/0683 ,  H01S5/50 ,  H01S5/068

Abstract: A laser system according to one aspect of the present disclosure includes a first solid-state laser device, a wavelength conversion system, an excimer amplifier, and a control unit. The first solid-state laser device includes a first multiple semiconductor laser system, a first semiconductor optical amplifier, and a first fiber amplifier. The first multiple semiconductor laser system includes a plurality of first semiconductor lasers configured to perform continuous wave oscillation in a single longitudinal mode with different wavelengths, a first spectrum monitor, and a first beam combiner. The control unit controls an oscillation wavelength and light intensity of each line of a first multiline spectrum generated by the first semiconductor lasers to obtain an excimer laser beam having at least a target center wavelength or a target spectral line width instructed by an external device.

公开(公告)号：US20230378713A1

公开(公告)日：2023-11-23

申请号：US18363602

申请日：2023-08-01

Applicant: Gigaphoton Inc. ,  Inter-University Research Institute Corporation, National Institutes of Natural Sciences

Inventor： Yuki TAMARU ,  Taisuke MIURA ,  Ryo YASUHARA

IPC: H01S3/10 ,  H01S3/00 ,  H01S3/225 ,  H01S3/23 ,  G03F7/00

CPC classification number: H01S3/10061 ,  H01S3/0064 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/0071 ,  H01S3/0014 ,  H01S3/2325 ,  G03F7/70025 ,  G03F7/70191

Abstract: An ultraviolet laser apparatus includes an oscillation-stage laser, an amplifier that amplifies the pulse laser light, and an optical isolator. The optical isolator includes a first Faraday rotator that rotates the polarization direction of the pulse laser light output from the oscillation-stage laser by a first angle in a first rotation direction, a first polarizer so disposed to transmit the pulse laser light that exits out of the first Faraday rotator at normalized transmittance greater than or equal to 0.9, a second Faraday rotator that rotates the polarization direction of the pulse laser light passing through the first polarizer by a second angle in the opposite direction to the first rotation direction, and a second polarizer so disposed to transmit the pulse laser light that exits out of the second Faraday rotator at the normalized transmittance greater than or equal to 0.9.

公开(公告)号：US20230375847A1

公开(公告)日：2023-11-23

申请号：US18363651

申请日：2023-08-01

Applicant: Gigaphoton Inc. ,  Inter-University Research Institute Corporation, National Institutes of Natural Sciences

Inventor： Yuki TAMARU ,  Taisuke MIURA ,  Ryo YASUHARA

IPC: G02B27/28 ,  H01S3/04 ,  H01S3/225 ,  H01S3/23

CPC classification number: G02B27/28 ,  H01S3/0401 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/23

Abstract: An optical isolator includes a first polarizer arranged such that a transmission axis thereof is set to cause a normalized transmittance with respect to incident light having a wavelength of ultraviolet and linear polarization to be 0.9 or more, a Faraday rotator using a Faraday material configured to rotate a polarization direction of light having transmitted through the first polarizer in a first rotation direction by a first rotation amount by a magnetic field and rotate the polarization direction in a second rotation direction opposite to the first rotation direction by a second rotation amount by optical activity or birefringence, and a second polarizer arranged such that a transmission axis thereof is set to cause a normalized transmittance with respect to the incident light having transmitted through the Faraday rotator to be 0.9 or more.

公开(公告)号：US20230375846A1

公开(公告)日：2023-11-23

申请号：US18363279

申请日：2023-08-01

Applicant: Gigaphoton Inc. ,  Inter-University Research Institute Corporation, National Institutes of Natural Sciences

Inventor： Yuki TAMARU ,  Taisuke MIURA ,  Ryo YASUHARA

IPC: G02B27/28 ,  H01S3/04 ,  H01S3/225 ,  H01S3/23

CPC classification number: G02B27/28 ,  H01S3/0401 ,  H01S3/2256 ,  H01S3/2251 ,  H01S3/23

Abstract: An optical isolator according to an aspect of the present disclosure includes a first polarizer through which incident light transmits, a Faraday rotator configured to rotate the polarization direction of the light, and a second polarizer through which the light transmits. The Faraday rotator includes a calcium fluoride crystal. When a, b, and c axes are the [001], [100], and [010] crystallographic axes, respectively, and x, y, and z axes are obtained by rotating the three axes by a first angle of 40° to 50° about the c axis and by a second angle of 45° to 75° about the b axis rotated by the first angle, the z axis is parallel to the propagation direction of the light, and the calcium fluoride crystal is disposed such that the transmission axis of the first polarizer and the x axis have an angle difference of 0° to 45°.

公开(公告)号：US20220059988A1

公开(公告)日：2022-02-24

申请号：US17517982

申请日：2021-11-03

Applicant: Gigaphoton Inc.

Inventor： Yuki TAMARU ,  Taisuke MIURA

IPC: H01S5/068 ,  H01S5/50 ,  H01S5/042 ,  H01S5/00 ,  H01S5/02253

Abstract: A laser system includes a beam shaping unit, a random phase plate, and a collimating optical system in an optical path between a solid-state laser device and an excimer amplifier. When a traveling direction of a laser beam entering the excimer amplifier is a Z direction, a discharge direction of a pair of discharge electrodes is a V direction, a direction orthogonal to the V and Z directions is an H direction, a shaping direction of the beam shaping unit corresponding to the V direction is a first direction, a shaping direction of the beam shaping unit corresponding to the H direction is a second direction, an expansion rate in the first direction is E1, and an expansion rate in the second direction is E2, the beam shaping unit expands a beam section of the laser beam such that an expansion ratio defined by E2/E1 is higher than 1.

公开(公告)号：US20240364076A1

公开(公告)日：2024-10-31

申请号：US18766837

申请日：2024-07-09

Applicant: Gigaphoton Inc.

Inventor： Chen QU ,  Taisuke MIURA

IPC: H01S5/06 ,  H01S5/065 ,  H01S5/50

CPC classification number: H01S5/0611 ,  H01S5/0654 ,  H01S5/50

Abstract: A laser system includes a first semiconductor laser device configured to output first CW laser light, a first semiconductor optical amplification device configured to amplify the first CW laser light and output second CW laser light, an optical parametric amplification device configured to amplify the second CW laser light and output first pulse laser light, and a wavelength conversion device configured to perform wavelength conversion on the first pulse laser light and output second pulse laser light in a deep ultraviolet wavelength region.

公开(公告)号：US20240291219A1

公开(公告)日：2024-08-29

申请号：US18656729

申请日：2024-05-07

Applicant: Gigaphoton Inc. ,  Inter-University Research Institute Corporation, National Institutes of Natural Sciences

Inventor： Yuki TAMARU ,  Taisuke MIURA ,  Ryo YASUHARA

IPC: H01S3/00 ,  G02B17/02 ,  G02B17/06 ,  G02B27/28 ,  G02F1/01 ,  G02F1/09 ,  G03F7/00 ,  G03F7/20 ,  H01S3/225

CPC classification number: H01S3/0057 ,  G02B17/023 ,  G02B17/0663 ,  G02B27/288 ,  G02F1/0136 ,  G02F1/092 ,  G03F7/2008 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70566 ,  H01S3/225

Abstract: An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.

公开(公告)号：US20240186760A1

公开(公告)日：2024-06-06

申请号：US18402829

申请日：2024-01-03

Applicant: Gigaphoton Inc.

Inventor： Takayuki YABU ,  Taisuke MIURA

IPC: H01S3/10 ,  G02F1/35 ,  G03F7/00 ,  H01S3/094 ,  H01S3/102 ,  H01S3/108 ,  H01S3/16

CPC classification number: H01S3/10092 ,  G02F1/3507 ,  G03F7/70025 ,  G03F7/70191 ,  G03F7/70525 ,  H01S3/094076 ,  H01S3/1024 ,  H01S3/108 ,  H01S3/1625 ,  H01S3/1636 ,  G02F1/3534

Abstract: A laser apparatus includes a first seed laser outputting continuous-wave first seed laser light having a first wavelength, a second seed laser outputting continuous-wave second seed laser light having a second wavelength, an optical switch sequentially selecting the first seed laser light and the second seed laser light one at a time and outputting the selected seed laser light, a first pulsing section pulsing the selected laser light and outputting first pulse laser light, a wavelength converter outputting output laser light by using the first pulse laser light, and a processor controlling a timing of sequentially selecting the first seed laser light and the second seed laser light one at a time. The wavelength converter outputs the output laser light having a first converted wavelength produced using the first wavelength, and outputs the output laser light having a second converted wavelength produced using the second wavelength.