公开(公告)号：US09222867B2

公开(公告)日：2015-12-29

申请号：US13476989

申请日：2012-05-21

Applicant: Brian L. Norling ,  John C. G. Dunfield

Inventor： Brian L. Norling ,  John C. G. Dunfield

IPC: G01R33/00 ,  G01R33/34 ,  G01N5/02 ,  G01R33/028 ,  G01N1/40 ,  G01R33/12 ,  G01N1/22

CPC classification number: G01N5/02 ,  G01N1/405 ,  G01N2001/2223 ,  G01R33/0286 ,  G01R33/1261

Abstract: A sensor system is formed from a micro machined resonant structure with multiple resonant elements, a tracking resonator control electronics, and signal processing algorithms. The moving elements of the resonator are coated with chemically active materials that change mass when exposed to the target chemical resulting in a change in frequency or period of oscillation. The changes in frequency or period are processed by multi-sensor chemical detection algorithms to identify chemical types and concentrations. In essence, the resonator and drive electronics form a closed loop oscillator operating at the resonator's natural frequency. The resonators are formed from silicon using photolithographic processes. The resonator design includes in-plane resonant motion combined with dynamic balance to operate with a high Q even in the presence of atmospheric pressure.

Abstract translation: 传感器系统由具有多个谐振元件的微加工谐振结构，跟踪谐振器控制电子器件和信号处理算法形成。 谐振器的移动元件涂覆有化学活性材料，其在暴露于目标化学物质时改变质量，导致振荡频率或振荡周期的变化。 频率或周期的变化由多传感器化学检测算法处理，以识别化学类型和浓度。 实质上，谐振器和驱动电子器件形成以谐振器的固有频率工作的闭环振荡器。 谐振器由使用光刻工艺的硅形成。 谐振器设计包括平面内谐振运动与动平衡结合，即使在大气压力存在的情况下也能以高Q运行。

公开(公告)号：US5377545A

公开(公告)日：1995-01-03

申请号：US986958

申请日：1992-12-08

Applicant: Brian L. Norling ,  James R. Woodruff

Inventor： Brian L. Norling ,  James R. Woodruff

IPC: G01P15/08 ,  G01P15/13

CPC classification number: G01P15/131 ,  G01P15/0894

Abstract: A servo accelerometer uses a tunnel current sensor having a first sensing electrode coupled in fixed alignment with a frame and a second sensing electrode coupled to a proof mass. A position sensing circuit develops a sensing signal indicative of displacement of the proof mass. A feedback circuit provides an output signal and provides a feedback signal to electrostatic drive electrodes for applying an electrostatic repositioning force to the proof mass. The proof mass and frame are connected by a highly compliant suspension structure.

Abstract translation: 伺服加速度计使用隧道电流传感器，该隧道电流传感器具有与框架固定对准的第一感测电极和耦合到检测质量块的第二感测电极。 位置检测电路产生指示检验质量块位移的感测信号。 反馈电路提供输出信号，并向静电驱动电极提供反馈信号，以将静电重新定位力施加到检测质量块。 检测质量和框架通过高度兼容的悬挂结构连接。

公开(公告)号：USRE34631E

公开(公告)日：1994-06-07

申请号：US898963

申请日：1992-06-12

Applicant: Brian L. Norling

Inventor： Brian L. Norling

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/13

CPC classification number: G01P1/006 ,  G01P15/132 ,  G01P2015/0828

Abstract: A transducer having compensation for a deflection due to an applied stress. The transducer includes a support ring (32) having a proof mass (34) cantilevered on a pair of flexures (38) between the magnets (26,28) of a stator in which the transducer is mounted. Deflection of the support ring due to an imbalanced applied force is compensated by either moving the pads (30) used to mount the support ring, moving the centroid of capacitance (42) of the proof mass, or by modifying the support ring to provide a pair of moment arms (152), each approach insuring that an axis of deflection (102,130) of the support ring is coaligned with the centroid of capacitance, thereby minimizing a bias error in the transducer output.

Abstract translation: 具有由于施加的应力引起的偏转补偿的换能器。 换能器包括支撑环（32），该支撑环具有悬挂在定子的磁体（26,28）之间的一对挠曲件（38）上的检测质量块（34），其中安装有换能器。 通过移动用于安装支撑环的垫（30），移动检体的电容（42）的质心，或通过修改支撑环来提供由于不平衡施加力而引起的支撑环的偏转， 一对力臂（152），每个方法确保支撑环的偏转轴线（102,130）与电容的重心相结合，从而最小化换能器输出中的偏置误差。

公开(公告)号：US5005413A

公开(公告)日：1991-04-09

申请号：US316399

申请日：1989-02-27

Applicant: Mitchell J. Novack ,  Brian L. Norling ,  James R. Woodruff

Inventor： Mitchell J. Novack ,  Brian L. Norling ,  James R. Woodruff

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/12

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: A push-pull accelerometer in which both force transducers lie in a common plane. Thus, when implemented in silicon micromachined device, both transducers can be fabricated from a single crystal layer, thereby producing transducers with closely matched common mode responses.

Abstract translation: 推力加速度计，其中两个力传感器位于公共平面中。 因此，当在硅微加工器件中实现时，两个换能器可以由单晶层制造，从而产生具有紧密匹配的共模响应的换能器。

公开(公告)号：US4901586A

公开(公告)日：1990-02-20

申请号：US316899

申请日：1989-02-27

Applicant: Graeme A. Blake ,  Brian L. Norling

Inventor： Graeme A. Blake ,  Brian L. Norling

IPC: G01L1/10 ,  G01L1/18 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01L1/10 ,  G01L1/183 ,  Y10S73/01

Abstract: A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body having first and second generally parallel beams, coupled together at their ends. First and second electrodes are positioned adjacent to but not in contact with the respective beams. A drive circuit causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.

Abstract translation: 具有静电驱动系统的双振动束力传感器。 换能器包括具有第一和第二大致平行的梁的主体，它们的端部联接在一起。 第一和第二电极定位成与各个光束相邻而不与其接触。 驱动电路使振荡电压施加到电极。 因此，光束受到静电力的作用，使得光束在包含两个光束的振动平面中振荡。 光束的机械谐振控制振荡频率，使得频率是沿着光束施加的力的函数。 还描述了一种实施例，其中驱动装置直接连接到一个梁。

公开(公告)号：US4872342A

公开(公告)日：1989-10-10

申请号：US222680

申请日：1988-07-21

Applicant: Richard A. Hanson ,  Rex B. Peters ,  Brian L. Norling ,  Edward A. Urbach

Inventor： Richard A. Hanson ,  Rex B. Peters ,  Brian L. Norling ,  Edward A. Urbach

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P2015/0828 ,  Y10T29/49007

Abstract: An accelerometer comprising a body (10, 16, 12), a proof mass (18, 30, 32), a mounting strucutre comprising flexures (20, 22) for mounting the proof mass to the body, and force sensing elements (34, 38). The flexures permit translational motion of the proof mass with respect to the body along a sensitive axis SA and rotation of the proof mass with respect to the body about a hinge axis HA that is perpendicular to the sensitive axis. Acceleration of the accelerometer along the sensitive axis results in translational motion of the proof mass along the sensitive axis. The force sensing elements reacts to such translational motion by producing a signal indicative of acceleration along the sensitive axis. In a preferred embodiment, the mounting structure comprises a pair of fused quartz flexures that are oppositely directed with respect to one another, and the force sensing elements comprise a pair of vibrating beam force transducers that are connected to the proof mass on opposite sides of the hinge axis from one another. The described assembly method for accelerometers comprises forming bridges between the proof mass and body, the bridges being removed after attachment of the force sensing elements.

Abstract translation: 1.一种加速度计，包括主体（10,16,12），检验质量块（18,30,32），安装结构，其包括用于将所述证明物质安装到所述主体的挠曲件（20,22），以及力传感元件（34， 38）。 挠曲件允许检测质量体沿着敏感轴线SA相对于身体的平移运动，并且证明物质相对于身体围绕垂直于敏感轴线的铰链轴线HA旋转。 加速度传感器沿着敏感轴的加速导致检测质量沿着敏感轴的平移运动。 力感测元件通过产生指示沿着敏感轴的加速度的信号来对这种平移运动做出反应。 在优选实施例中，安装结构包括相对于彼此相对地指向的一对熔融石英弯曲部，并且力感测元件包括一对振动梁力传感器，其连接到在 铰链轴彼此。 所描述的用于加速度计的装配方法包括在检验质量块和本体之间形成桥，桥接件在附接力感测元件之后被移除。

公开(公告)号：US5275048A

公开(公告)日：1994-01-04

申请号：US822778

申请日：1992-01-21

Applicant: Rand H. Hulsing, II ,  Brian L. Norling ,  James R. Woodruff

Inventor： Rand H. Hulsing, II ,  Brian L. Norling ,  James R. Woodruff

IPC: G01P15/02

CPC classification number: G01P15/02

Abstract: An acceleration overload protection mechanism for use with a sensor unit. The sensor unit is generally defined by a sensor element or elements (i.e., proof mass, flexures, etc.) that are movable in relation to a sensor frame. The overload protection mechanism includes at least one arresting plate. The arresting plate includes a plate frame and an arresting element that are elastically coupled to one another to permit relative movement therebetween. The plate frame of the overload protection mechanism is placed in fixed alignment with the sensor frame to place the arresting element in spaced relation with the sensor element of the sensor unit. The arresting element and sensor element may move relative to one another to allow the arresting element to move to a position proximate the sensor element to limit the range of motion of the sensor element when the sensor unit is subject to an acceleration overload. Projections extend between the arresting element and sensor unit to engage corresponding channels thereby protecting the sensor unit from damage due to cross-axis accelerations.

Abstract translation: 用于传感器单元的加速过载保护机构。 传感器单元通常由相对于传感器框架可移动的传感器元件（即，检验质量块，挠曲件等）限定。 过载保护机构包括至少一个止动板。 止动板包括板框架和止动元件，其相互弹性地联接以允许它们之间的相对移动。 过载保护机构的平板框架与传感器框架固定对准，以将止动元件与传感器单元的传感器元件间隔开。 阻止元件和传感器元件可以相对于彼此移动，以允许止动元件移动到靠近传感器元件的位置，以在传感器单元经受加速过载时限制传感器元件的运动范围。 突出部分在阻止元件和传感器单元之间延伸以接合相应的通道，从而保护传感器单元免受横轴加速度的损害。

公开(公告)号：US5156460A

公开(公告)日：1992-10-20

申请号：US609247

申请日：1990-11-05

Applicant: Brian L. Norling ,  Rex B. Peters

Inventor： Brian L. Norling ,  Rex B. Peters

IPC: G01K7/32

CPC classification number: G01K7/32

Abstract: A vibrating crystal transducer for measuring temperature is disclosed. The crystal includes a single elongated vibrating beam that has a torsional mode resonant frequency that is a function of the temperature of the crystal. The torsional moments of the crystal are reverse symmetric with respect to a nodal line on the beam. The beam is contained in a frame that is secured to a sensor frame member. The beam is attached to the frame by a pair of opposed mounting posts that are in line with the nodal line on the beam. The beam, the beam frame (16) and the mounting posts are formed out of an integral section of crystalline material. When the beam is vibrated, the reverse symmetrically opposed torsional moments along the beam cancel each other out and, consequently, no torsional energy is transmitted through the mounting posts to the beam frame or the sensor frame. Since the beam frame does not serve as a recipient for the torsional energy, torsional energy is not lost through the beam frame so that the beam has a relatively high quality factor and torsional vibration of the beam cannot cause the crystal to eventually work loose of the sensor frame at the beam frame.

Abstract translation: 公开了一种用于测量温度的振动晶体传感器。 该晶体包括具有与晶体温度有关的扭转模式谐振频率的单个细长振动光束。 晶体的扭转力矩相对于梁上的节点线是反向对称的。 梁被容纳在固定到传感器框架构件的框架中。 梁通过与梁上的节点线对准的一对相对的安装柱而附接到框架。 梁，梁架（16）和安装柱由结晶材料的整体部分形成。 当梁被振动时，沿着梁的反向对称的扭转力矩彼此抵消，并且因此没有扭转能量通过安装柱传递到梁架或传感器框架。 由于波束框架不能用作扭转能量的接受者，扭转能量不会通过波束架失去，因此波束具有较高的品质因数，波束的扭转振动不能导致晶体最终松动 传感器框架在梁框架。

公开(公告)号：US4750363A

公开(公告)日：1988-06-14

申请号：US879262

申请日：1986-06-27

Applicant: Brian L. Norling

Inventor： Brian L. Norling

IPC: G01P1/00 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P1/006 ,  G01P2015/0828

Abstract: Prior vibrating beam accelerometers are subject to errors caused by differential thermal expansion between the vibrating beams and other accelerometer components. This problem is overcome by the present accelerometer that comprises a housing (32), a proof mass (30), a support (34,36) for mounting the proof mass with respect to the housing, and first and second force sensing elements (38,40). The force sensing elements are connected between the proof mass and the housing such that differential thermal expansion or contraction between the force sensing elements and the proof mass, support and housing results in rotation of the proof mass about a compensation axis (CA) normal to the sensitive axis (SA). The force sensing elements may extend from their respective points of connection to the proof mass in opposite directions parallel to the sensitive axis to their respective points of connection to the housing, and the force sensing elements may be connected to the proof mass at spaced apart positions on opposite sides of the compensation axis.

Abstract translation: 现有的振动梁加速度计会受到振动梁和其他加速度计部件之间差动热膨胀的误差。 本发明的加速度计克服了这个问题，该加速度计包括壳体（32），检测质量块（30），用于相对于壳体安装证明物质的支撑件（34,36），以及第一和第二力传感元件 ，40）。 力传感元件连接在检测质量块和壳体之间，使得力传感元件与检测质量块，支撑件和壳体之间的差别热膨胀或收缩导致检验质量块围绕垂直于 敏感轴（SA）。 力感测元件可以从它们各自的连接点延伸到与感测轴平行的相反方向的连接到壳体的各自的连接点，并且力感测元件可以在间隔开的位置处连接到检验质量块 在补偿轴的相对侧。

公开(公告)号：US4726228A

公开(公告)日：1988-02-23

申请号：US853154

申请日：1986-04-16

Applicant: Brian L. Norling

Inventor： Brian L. Norling

IPC: G01P1/00 ,  G01P15/13 ,  H01L21/336 ,  H01L27/115

CPC classification number: H01L29/66825 ,  G01P1/006 ,  G01P15/132 ,  H01L27/115

Abstract: An accelerometer with improved resistance to errors due to thermal stress. The accelerometer comprises a proof mass assembly (44), a stator (40), and an interface member (90) that includes a plate-like body positioned between the proof mass assembly and the stator. The proof mass assembly includes a reed (72) suspended from a support (70), and a reed capacitor plate positioned on the reed. The body includes a body capacitor plate (94) positioned to form a capacitor with the reed capacitor plate. The interface member includes first mounting member (110) for securely mounting a first area of the stator with respect to a corresponding first area of the support, and a mounting element (126) extending between a second area of the stator and a corresponding second area of the support. The mounting element is relatively compliant along a first axis, and relatively rigid along all other axes. The first axis lies in the plane of the body and passes approximately through the first mounting member.

Abstract translation: 一种加速度计，具有改善的抵抗由于热应力引起的误差。 加速度计包括检测质量组件（44），定子（40）和界面构件（90），其包括位于检测质量组件和定子之间的板状体。 检测质量组件包括从支撑件（70）悬挂的簧片（72）和位于簧片上的簧片电容器板。 本体包括一个体电容器板（94），其被定位成与簧片电容器板形成电容器。 接口构件包括用于相对于支撑件的对应的第一区域牢固地安装定子的第一区域的第一安装构件（110）和在定子的第二区域和相应的第二区域之间延伸的安装元件（126） 的支持。 安装元件沿着第一轴线相对柔顺，并且沿着所有其它轴线相对刚性。 第一轴位于主体的平面中，并且大致穿过第一安装构件。