公开(公告)号：US20240088071A1

公开(公告)日：2024-03-14

申请号：US17944596

申请日：2022-09-14

Applicant: Applied Materials, Inc.

Inventor： Yi XU ,  Yu LEI ,  Zhimin QI ,  Aixi ZHANG ,  Xianyuan ZHAO ,  Wei LEI ,  Xingyao GAO ,  Shirish A. PETHE ,  Tao HUANG ,  Xiang CHANG ,  Patrick Po-Chun LI ,  Geraldine VASQUEZ ,  Dien-yeh WU ,  Rongjun WANG

IPC: H01L23/00

CPC classification number: H01L24/03 ,  H01L24/05 ,  H01L2224/03452 ,  H01L2224/03845 ,  H01L2224/05026 ,  H01L2224/05082 ,  H01L2224/05157 ,  H01L2224/05184 ,  H01L2924/01027 ,  H01L2924/01074 ,  H01L2924/04941 ,  H01L2924/0496 ,  H01L2924/059 ,  H01L2924/35121

Abstract: Methods for reducing resistivity of metal gapfill include depositing a conformal layer in an opening of a feature and on a field of a substrate with a first thickness of the conformal layer of approximately 10 microns or less, depositing a non-conformal metal layer directly on the conformal layer at a bottom of the opening and directly on the field using an anisotropic deposition process. A second thickness of the non-conformal metal layer on the field and on the bottom of the feature is approximately 30 microns or greater. And depositing a metal gapfill material in the opening of the feature and on the field where the metal gapfill material completely fills the opening without any voids.

公开(公告)号：US20230326791A1

公开(公告)日：2023-10-12

申请号：US17718242

申请日：2022-04-11

Applicant: Applied Materials, Inc.

Inventor： Zhimin QI ,  Yi XU ,  Shirish A. PETHE ,  Xingyao GAO ,  Shiyu YUE ,  Aixi ZHANG ,  Wei LEI ,  Yu LEI ,  Geraldine VASQUEZ ,  Dien-yeh WU ,  Da HE

IPC: H01L21/768 ,  H01L21/285 ,  C23C14/18 ,  C23C16/14

CPC classification number: H01L21/76879 ,  H01L21/2855 ,  H01L21/28562 ,  H01L21/28568 ,  C23C14/18 ,  C23C16/14

Abstract: Embodiments of methods and associated apparatus for filling a feature in a substrate are provided herein. In some embodiments, a method of depositing tungsten in features of a substrate includes: depositing a seed layer consisting essentially of tungsten in the features via a physical vapor deposition (PVD) process; and depositing a bulk layer consisting essentially of tungsten in the features via a chemical vapor deposition (CVD) process to fill the features such that the deposition of the bulk layer is selective to within the features as compared to a field region of the substrate, wherein the CVD process is performed by flowing hydrogen gas (H2) at a first flow rate and a tungsten precursor at a second flow rate, and wherein the first flow rate is less than the second flow rate.

公开(公告)号：US20240087955A1

公开(公告)日：2024-03-14

申请号：US18241343

申请日：2023-09-01

Applicant: Applied Materials, Inc.

Inventor： Yi XU ,  Xianyuan ZHAO ,  Zhimin QI ,  Aixi ZHANG ,  Geraldine VASQUEZ ,  Dien-Yeh WU ,  Wei LEI ,  Xingyao GAO ,  Shirish PETHE ,  Wenting HOU ,  Chao DU ,  Tsung-Han YANG ,  Kyoung-Ho BU ,  Chen-Han LIN ,  Jallepally RAVI ,  Yu LEI ,  Rongjun WANG ,  Xianmin TANG

IPC: H01L21/768

CPC classification number: H01L21/76879 ,  H01L21/76843 ,  H01L21/76856 ,  H01L21/76876

Abstract: A method and apparatus for forming tungsten features in semiconductor devices is provided. The method includes exposing a top opening of a feature formed in a substrate to a physical vapor deposition (PVD) process to deposit a tungsten liner layer within the feature. The PVD process is performed in a first processing region of a first processing chamber and the tungsten liner layer forms an overhang portion, which partially obstructs the top opening of the feature. The substrate is transferred from the first processing region of the first processing chamber to a second processing region of a second processing chamber without breaking vacuum. The overhang portion is exposed to nitrogen-containing radicals in the second processing region to inhibit subsequent growth of tungsten along the overhang portion. The feature is exposed to a tungsten-containing precursor gas to form a tungsten fill layer over the tungsten liner layer within the feature.

公开(公告)号：US20240018648A1

公开(公告)日：2024-01-18

申请号：US18220408

申请日：2023-07-11

Applicant: Applied Materials, Inc.

Inventor： Geraldine VASQUEZ ,  Yi XU ,  Dien-yeh WU ,  Aixi ZHANG ,  Jallepally RAVI ,  Yu LEI

IPC: C23C16/44 ,  H01J37/32 ,  C23C16/458

CPC classification number: C23C16/4408 ,  H01J37/32798 ,  C23C16/4586 ,  H01J2237/3321

Abstract: Embodiments of a purge ring for use in a process chamber are provided herein. In some embodiments, a purge ring includes: an annular body having an inner portion and an outer portion, wherein the inner portion includes an inner surface of the annular body, the inner surface comprising a first inner sidewall, a second inner sidewall, and a third inner sidewall, wherein the inner portion has an upper inner notch that defines the first inner sidewall and a lower inner notch that defines the second inner sidewall, wherein a third inner sidewall is disposed between the first inner sidewall and the second inner sidewall, and wherein the first inner sidewall and the second inner sidewall are disposed radially outward of the third inner sidewall.