公开(公告)号：US12255042B2

公开(公告)日：2025-03-18

申请号：US17636344

申请日：2020-08-15

Applicant: ASML Netherlands B.V.

Inventor： Thomas Jarik Huisman ,  Shakeeb Bin Hasan

IPC: H01J37/28 ,  G06T5/70 ,  H01J37/22

Abstract: Systems and methods for image enhancement are disclosed. A method for enhancing an image may include acquiring a scanning electron microscopy (SEM) image. The method may also include simulating diffused charge associated with a position of the SEM image. The method may further include providing an enhanced SEM image based on the SEM image and the diffused charge.

公开(公告)号：US11881374B2

公开(公告)日：2024-01-23

申请号：US17430307

申请日：2020-02-04

Applicant: ASML Netherlands B.V.

Inventor： Shakeeb Bin Hasan ,  Yan Ren ,  Maikel Robert Goosen ,  Albertus Victor Gerardus Mangnus ,  Erwin Paul Smakman

IPC: H01J37/04 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J37/28 ,  H01J2237/028

Abstract: Disclosed among other aspects is a charged particle inspection system including an absorbing component and a programmable charged-particle mirror plate arranged to modify the energy distribution of electrons in a beam and shape the beam to reduce the energy spread of the electrons and aberrations of the beam, with the absorbing component including a set of absorbing structures configured as absorbing structures provided on a transparent conductive layer and a method using such an absorbing component and with the programmable charged-particle mirror plate including a set of pixels configured to generate a customized electric field to shape the beam and using such a programmable charged-particle mirror plate.

公开(公告)号：US12092964B2

公开(公告)日：2024-09-17

申请号：US17782771

申请日：2020-11-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Shakeeb Bin Hasan ,  Benoit Herve Gaury

IPC: G03F7/00 ,  G01B11/14 ,  G01N21/552

CPC classification number: G03F7/70633 ,  G01B11/14 ,  G01N21/553 ,  G03F7/70625

Abstract: Optically determining whether metallic features in different layers in a structure are in electrical contact with each other. When the metallic features include different metals and/or have different dimensions, which cause one or more resonances in reflected radiation to be detected, the metallic features in the different layers are determined to be in contact or out of contact with each other based on the spectral positions of the one or more resonances. When the metallic features are formed from the same metal and have the same dimensions, the metallic features in the different layers are determined to be in contact with each other responsive to detection of a single resonance associated with the metallic features and out of contact with each other responsive to detection of two or more resonances associated with the metallic features.