发明授权
- 专利标题: Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture
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申请号: US15060630申请日: 2016-03-04
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公开(公告)号: US09953787B2公开(公告)日: 2018-04-24
- 发明人: Christopher S. Gudeman , Paul J. Rubel , Marin Sigurdson
- 申请人: Innovative Micro Technology
- 申请人地址: US CA Goleta
- 专利权人: Innovative Micro Technology
- 当前专利权人: Innovative Micro Technology
- 当前专利权人地址: US CA Goleta
- 代理商 Jaquelin K. Spong
- 主分类号: H01H59/00
- IPC分类号: H01H59/00 ; B81B7/00 ; B81C1/00 ; H01H49/00 ; H01H1/00
摘要:
Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.
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