- Patent Title: Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly
-
Application No.: US13794701Application Date: 2013-03-11
-
Publication No.: US09795983B2Publication Date: 2017-10-24
- Inventor: Min Ho Kim , You Min Cha , Seuk Hwan Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2012-0097799 20120904
- Main IPC: B05C3/20
- IPC: B05C3/20 ; C23C14/04 ; C23C14/46 ; C23C14/52 ; C23C14/54 ; C23C14/56

Abstract:
A deposition apparatus includes deposition sources, a deposition chamber, a mask assembly, and a transfer unit. The mask assembly includes a support member, a shutter member, and a drive member. The support member has a first opening configured to allow the deposition materials to pass through while supporting the base substrate on which the passed-through deposition materials are deposited. The shutter member is accommodated in the support member and has a second opening smaller than the first opening. The drive member is configured to change a position of the second opening with respect to the base substrate in accordance with the movement of the mask assembly.
Public/Granted literature
Information query