Invention Grant
- Patent Title: Logic semiconductor devices
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Application No.: US15188743Application Date: 2016-06-21
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Publication No.: US09741661B2Publication Date: 2017-08-22
- Inventor: Raheel Azmat , Sengupta Rwik , Su-Hyeon Kim , Chul-Hong Park , Jae-Hyoung Lim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0147869 20151023
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; H01L27/00 ; H01L29/00 ; H01L23/528 ; H01L27/092 ; H01L29/08 ; H01L29/161 ; H01L29/16 ; H01L29/165 ; H01L29/78 ; H01L29/06 ; H01L21/8238 ; H01L29/66 ; H01L21/285

Abstract:
A logic semiconductor device includes a plurality of active patterns extending in a horizontal direction and being spaced apart from each other in a vertical direction, an isolation layer defining the active patterns, a plurality of gate patterns extending in the vertical direction on the active patterns and the isolation layer, the gate patterns being spaced apart from each other in the horizontal direction, a plurality of lower wirings extending in the horizontal direction over the gate patterns, a plurality of upper wirings extending in the vertical direction over the lower wirings, a through contact connecting at least one upper wiring of the upper wirings and at least one gate pattern of the gate patterns, the through contact extending from a bottom surface of the upper wiring to a position under a bottom surface of one of the lower wirings relative to the active patterns.
Public/Granted literature
- US20170117223A1 LOGIC SEMICONDUCTOR DEVICES Public/Granted day:2017-04-27
Information query
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