Invention Grant
- Patent Title: Active pixel sensor with nanowire structured photodetectors
- Patent Title (中): 有源像素传感器与纳米线结构光电探测器
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Application No.: US14293164Application Date: 2014-06-02
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Publication No.: US09490283B2Publication Date: 2016-11-08
- Inventor: Young-June Yu , Munib Wober
- Applicant: ZENA TECHNOLOGIES, INC.
- Applicant Address: US MA Cambridge
- Assignee: ZENA TECHNOLOGIES, INC.
- Current Assignee: ZENA TECHNOLOGIES, INC.
- Current Assignee Address: US MA Cambridge
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L27/146 ; H01L31/0232 ; H01L31/0352 ; H01L31/101 ; H01L31/102 ; H01L31/112

Abstract:
An imaging device formed as an active pixel array combining a CMOS fabrication process and a nanowire fabrication process. The pixels in the array may include a single or multiple photogates surrounding the nanowire. The photogates control the potential profile in the nanowire, allowing accumulation of photo-generated charges in the nanowire and transfer of the charges for signal readout. Each pixel may include a readout circuit which may include a reset transistor, charge transfer switch transistor, source follower amplifier, and pixel select transistor. A nanowire is generally structured as a vertical rod on the bulk semiconductor substrate to receive light energy impinging onto the tip of the nanowire. The nanowire may be configured to function as either a photodetector or a waveguide configured to guild the light to the substrate. Light of different wavelengths can be detected using the imaging device.
Public/Granted literature
- US20140361356A1 ACTIVE PIXEL SENSOR WITH NANOWIRE STRUCTURED PHOTODETECTORS Public/Granted day:2014-12-11
Information query
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