Invention Grant
- Patent Title: Periodic patterns and technique to control misalignment between two layers
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Application No.: US14961629Application Date: 2015-12-07
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Publication No.: US09476698B2Publication Date: 2016-10-25
- Inventor: Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Kwan & Olynick LLP
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01B11/14 ; G03F7/20 ; H01L21/66 ; H01L23/544 ; G01B11/26 ; G01N21/95
Abstract:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
Public/Granted literature
- US20160084639A1 Periodic Patterns and Technique to Control Misalignment Between Two Layers Public/Granted day:2016-03-24
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