- 专利标题: Vertical power MOSFET having planar channel and its method of fabrication
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申请号: US14873103申请日: 2015-10-01
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公开(公告)号: US09461127B2公开(公告)日: 2016-10-04
- 发明人: Jun Zeng , Mohamed N. Darwish , Kui Pu , Shih-Tzung Su
- 申请人: MaxPower Semiconductor, Inc.
- 申请人地址: US CA San Jose
- 专利权人: MaxPower Semiconductor, Inc.
- 当前专利权人: MaxPower Semiconductor, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Patent Law Group LLP
- 代理商 Brian D. Ogonowsky
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L29/08 ; H01L29/06 ; H01L29/423 ; H01L29/739 ; H01L29/10 ; H01L29/78
摘要:
A power MOSFET cell includes an N+ silicon substrate having a drain electrode. A low dopant concentration N-type drift layer is grown over the substrate. An N-type layer, having a higher dopant concentration than the drift region, is then formed and etched to have sidewalls. A P-well is formed in the N-type layer, and an N+ source region is formed in the P-well. A gate is formed over the P-well's lateral channel and has a vertical extension next to the top portion of the sidewalls. A positive gate voltage inverts the lateral channel and increases the conduction along the sidewalls to reduce on-resistance. A vertical shield field plate is also located next to the sidewalls and extends virtually the entire length of the sidewalls. The field plate laterally depletes the N-type layer when the device is off to increase the breakdown voltage.
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