- 专利标题: Etchant composition and method of forming metal wire and thin film transistor array panel using the same
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申请号: US14725849申请日: 2015-05-29
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公开(公告)号: US09347125B2公开(公告)日: 2016-05-24
- 发明人: In-Bae Kim , Jong-Hyun Choung , Seon-Il Kim , Hong-Sick Park , Wang Woo Lee , Jae-Woo Jeong , In Seol Kuk , Sang-Tae Kim , Young-Chul Park , Keyong Bo Shim , In-Ho Yu , Young-Jin Yoon , Suck-Jun Lee , Joon-Woo Lee , Sang-Hoon Jang , Young-Jun Jin
- 申请人: Samsung Display Co., Ltd. , DONGWOO FINE-CHEM CO., LTD.
- 申请人地址: KR Yongin-si KR Iksan-si
- 专利权人: Samsung Display Co., Ltd.,DONGWOO FINE-CHEM CO., LTD.
- 当前专利权人: Samsung Display Co., Ltd.,DONGWOO FINE-CHEM CO., LTD.
- 当前专利权人地址: KR Yongin-si KR Iksan-si
- 代理机构: H.C. Park & Associates, PLC
- 优先权: KR10-2012-0079973 20120723
- 主分类号: C23F1/18
- IPC分类号: C23F1/18 ; C22F1/18 ; H01L21/28 ; C23F1/26 ; H01L27/12 ; H01L21/3213 ; C09K13/00 ; C09K13/04 ; C09K13/06 ; C09K13/08 ; C23F1/14 ; C23F1/44 ; H01L21/32 ; H05K3/06
摘要:
A etchant composition that includes, based on a total weight of the etchant composition, about 0.5 wt % to about 20 wt % of a persulfate, about 0.5 wt % to about 0.9 wt % of an ammonium fluoride, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 10.0 wt % of a sulfonic acid, about 5 wt % to about 10 wt % of an organic acid or a salt thereof, and a remainder of water. The etchant composition may be configured to etch a metal layer including copper and titanium, to form a metal wire that may be included in a thin film transistor array panel of a display device.
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