Invention Grant
- Patent Title: Protection of a wafer-level chip scale package (WLCSP)
- Patent Title (中): 保护晶圆级芯片级封装(WLCSP)
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Application No.: US13967164Application Date: 2013-08-14
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Publication No.: US09196537B2Publication Date: 2015-11-24
- Inventor: Leonardus Antonius Elisabeth Van Gemert , Hartmut Buenning , Tonny Kamphuis , Sascha Moeller , Christian Zenz
- Applicant: NXP B.V.
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/78 ; H01L21/301 ; H01L21/44 ; H01L21/48 ; H01L21/50 ; H01L21/782 ; H01L23/31 ; H01L21/56

Abstract:
Consistent with an example embodiment, there is a method for assembling a wafer level chip scale processed (WLCSP) wafer; The wafer has a topside surface and an back-side surface, and a plurality of device die having electrical contacts on the topside surface. The method comprises back-grinding, to a thickness, the back-side surface the wafer. A protective layer of a thickness is molded onto the backside of the wafer. The wafer is mounted onto a sawing foil; along saw lanes of the plurality of device die, the wafer is sawed, the sawing occurring with a blade of a first kerf and to a depth of the thickness of the back-ground wafer. Again, the wafer is sawed along the saw lanes of the plurality of device die, the sawing occurring with a blade of a second kerf, the second kerf narrower than the first kerf, and sawing to a depth of the thickness of the protective layer. The plurality of device die are separated into individual device die. Each individual device die has a protective layer on the back-side, the protective layer having a stand-off distance from a vertical edge of the individual device die.
Public/Granted literature
- US20140138855A1 PROTECTION OF A WAFER-LEVEL CHIP SCALE PACKAGE (WLCSP) Public/Granted day:2014-05-22
Information query
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