Invention Grant
- Patent Title: Semiconductor devices formed using a sacrificial layer and methods for manufacturing the same
- Patent Title (中): 使用牺牲层形成的半导体器件及其制造方法
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Application No.: US13981808Application Date: 2012-07-24
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Publication No.: US09147745B2Publication Date: 2015-09-29
- Inventor: Huilong Zhu , Qingqing Liang , Huicai Zhong , Hao Wu
- Applicant: Huilong Zhu , Qingqing Liang , Huicai Zhong , Hao Wu
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201210247385 20120717
- International Application: PCT/CN2012/079081 WO 20120724
- International Announcement: WO2014/012263 WO 20140123
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/786 ; H01L21/28 ; H01L29/51

Abstract:
Semiconductor devices and methods for manufacturing the same are disclosed. In one embodiment, the method comprises: sequentially forming a sacrificial layer and a semiconductor layer on a substrate; forming a first cover layer on the semiconductor layer; forming an opening extending into the substrate with the first cover layer as a mask; selectively removing at least a portion of the sacrificial layer through the opening, and filling an insulating material in a gap due to removal of the sacrificial layer; forming one of source and drain regions in the opening; forming a second cover layer on the substrate; forming the other of the source and drain regions with the second cover layer as a mask; removing a portion of the second cover layer; and forming a gate dielectric layer, and forming a gate conductor in the form of spacer on a sidewall of a remaining portion of the second cover layer.
Public/Granted literature
- US20140110756A1 SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME Public/Granted day:2014-04-24
Information query
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