Invention Grant
US09040010B2 Apparatus for manufacturing single crystal silicon ingot having reusable dual crucible for silicon melting 有权
用于制造具有可重复使用的用于硅熔化的双坩埚的单晶硅锭的装置

Apparatus for manufacturing single crystal silicon ingot having reusable dual crucible for silicon melting
Abstract:
The present disclosure provides an apparatus for manufacturing a single crystal silicon ingot having a dual crucible for silicon melting which can be reused due to a dual crucible structure. The apparatus includes a dual crucible for silicon melting, into which raw silicon is charged, a crucible heater heating the dual crucible to melt the raw silicon into molten silicon, a crucible drive unit controlling rotation and elevation of the dual crucible, and a pull-up drive unit disposed above the dual crucible and pulling up a seed crystal dipped in the molten silicon to produce a silicon ingot. The dual crucible has a container shape open at an upper side thereof, and includes a graphite crucible having an inclined surface connecting an inner bottom and an inner wall, and a quartz crucible inserted into the graphite crucible and receiving the raw silicon charged into the dual crucible.
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