发明授权
- 专利标题： Test apparatus for reflective cavity characterization
- 专利标题（中）： 用于反射腔表征的测试装置
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申请号： US13922712申请日： 2013-06-20
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公开(公告)号： US08896837B1公开(公告)日： 2014-11-25
- 发明人: Joseph M. Ranish , Joseph Johnson , Mehran Behdjat
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： G01N21/55
- IPC分类号： G01N21/55
摘要：
An apparatus for reflectivity measurement is provided. The apparatus generally measures reflectivity characteristics of a reflective surface, such as a reflective cavity of a light array. The apparatus generally comprises a body defining a volume and a light emitting element disposed outside the volume. A sensor coupled to the body detects light reflected from a reflective surface. Various embodiments provide positioning of the apparatus relative to a light array having a reflective cavity.
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