Invention Grant
- Patent Title: Method for increasing the refresh time of the DRAM
- Patent Title (中): 增加DRAM刷新时间的方法
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Application No.: US728305Application Date: 1996-10-09
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Publication No.: US5882984APublication Date: 1999-03-16
- Inventor: Der-Tsyr Fan , Chon-Shin Jou , Ting S. Wang
- Applicant: Der-Tsyr Fan , Chon-Shin Jou , Ting S. Wang
- Applicant Address: TWX
- Assignee: Mosel Vitelic Inc.
- Current Assignee: Mosel Vitelic Inc.
- Current Assignee Address: TWX
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/8242 ; H01L21/76
Abstract:
The present invention is a method for increasing the refresh time of DRAM. This invention is for decreasing the stress between the bird's beak of field oxide and silicon substrate by using fluorine ion implant before field oxidation and the optimal structure of LOCOS to effectively preventing the current leakage from the bird's beak of field oxide. Therefore, this invention can increase the refresh time of DRAM and greatly enhance the performance in DRAM.
Public/Granted literature
- US4114886A Golf club Public/Granted day:1978-09-19
Information query
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