- 专利标题: METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SUPPORT SUBSTRATE, AND METHOD FOR PEELING SUBSTRATE
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申请号: US18589254申请日: 2024-02-27
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公开(公告)号: US20240297146A1公开(公告)日: 2024-09-05
- 发明人: Shota KONUMA , Hiroshi FUJITA , Hisashi KATO , Naomi YANAI
- 申请人: Kioxia Corporation
- 申请人地址: JP Tokyo
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP 23030650 2023.03.01
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/265 ; H01L21/324 ; H10B80/00
摘要:
According to one embodiment, a method for manufacturing a semiconductor device includes forming, on a substrate, an active layer in which a dopant is implanted; forming a porous layer by making the active layer porous by an anodization treatment; forming a device layer including at least a part of a configuration of the semiconductor device above the porous layer; and cleaving the porous layer to remove the substrate.
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